Joachim Rudhard

Method for producing a micromechanical structure and a micromechanical structure

Person-individual emergency recognition system

Sensor arrangement,in particular a micro-mechanical sensor arrangement

Integrated detonating or firing element, and use thereof

Integrated exploding element or igniting element used in a microreactor or in a vehicle air bag comprises a base body, especially a silicon body, and a reaction region

Method for Capping a MEMS Wafer and MEMS Wafer

Method for producing a device including an array of microneedles on a support, and device producible according to this method

Acceleration sensor has FET with two-layer electrode structure with first movable detection electrode for modulating current flow, second electrode with same deflection direction under acceleration

Method for structuring silicon carbide with the aid of fluorine-containing compounds

Musikinstrument und Vorrichtung zum Fernsteuern eines Vorgangs im Umfeld des Musikinstruments