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Johannes Kowalewski

Infineon Technologies

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Publication

Featured researches published by Johannes Kowalewski.

Archive | 2003

Method for production of contacts on a wafer

Werner Graf; Henning Haffner; Johannes Kowalewski; Lars Heineck

Archive | 2003

Producing hard mask for semiconductor structure involves providing structured mask layer on hard mask layer, ion implantation, removing structured layer, structuring hard mask layer by selectively etching non-implanted or implanted region

Lars Heineck; Johannes Kowalewski; Holger Möller; Ina Voigt

Archive | 2001

Producing contact holes in integrated circuit involves using optical lithography with mask with elongated, slit-shaped openings for producing essentially circular and/or elongated holes

Lothar Bauch; Schwerin Ulricke Gruening-Von; Henning Haffner; Johannes Kowalewski; Dominique Savignac; Klaus-Dieter Morhard; Guido Thielscher; Reiner Trinowitz

Archive | 2004

Method for producing a mask adapted to an exposure apparatus

Jens Hassmann; Johannes Kowalewski; Gerhard Kunkel; Thorsten Schedel; Uwe Paul Schroder; Ina Voigt

Archive | 2003

Method for producing a mask adapted to a lighting device

Jens Hassmann; Johannes Kowalewski; Gerhard Kunkel; Thorsten Schedel; Uwe Schroeder; Ina Voigt

Archive | 2004

Reducing illumination device imaging errors involves determining auxiliary structures acting on working structure diffraction spectrum with dimensions less than optical resolution limit by simulation

Johannes Kowalewski; Gerhard Kunkel; Rainer Pforr; Ina Voigt

Archive | 2002

A process for preparing a customized to an exposure device mask

Jens Hassmann; Ina Voigt; Johannes Kowalewski; Gerhard Kunkel; Thorsten Schedel; Uwe Schroeder

Archive | 2002

Verfahren zur Herstellung von Kontakten auf einem Wafer

Werner Graf; Henning Haffner; Johannes Kowalewski; Lars Heineck

Archive | 2002

Mark configuration, wafer with at least one mark configuration, and a method of producing at least one mark configuration

Hans-Georg Frohlich; Johannes Kowalewski; Udo Gotschkes; Frank Hubinger; Gerd Krause; Heike Langnickel; Antje Lassig; Reiner Trinowitz

Archive | 2002

Verfahren zur Herstellung von Kontakten auf einem Wafer A process for the production of contacts on a wafer

Werner Graf; Henning Haffner; Lars Heineck; Johannes Kowalewski

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Collaboration

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Ina Voigt

Infineon Technologies

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Henning Haffner

Infineon Technologies

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Jens Hassmann

Infineon Technologies

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Lars Heineck

Infineon Technologies

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Thorsten Schedel

Infineon Technologies

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Reiner Trinowitz

Infineon Technologies

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Uwe Schroeder

Infineon Technologies

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Werner Graf

Qimonda

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Gerhard Kunkel

IBM

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Gerhard Kunkel

IBM

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