John F. Wengert | Researchain

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Archive | 2000

Wafer support system

Michael W. Halpin; Mark R. Hawkins; Derrick W. Foster; Robert M. Vyne; John F. Wengert; Cornelius A. van der Jeugd; Loren R. Jacobs; Frank van Bilsen; Matthew G. Goodman; Hartmann Glenn; Jason M. Layton

Archive | 1996

Process chamber with inner support

John F. Wengert; Loren R. Jacobs; Michael W. Halpin; Derrick W. Foster; Cornelius A. van der Jeugd; Robert M. Vyne; Mark R. Hawkins

Archive | 1998

Long life high temperature process chamber

John F. Wengert; Ivo Raaijmakers; Mike Halpin; Loren R. Jacobs; Michael J. Meyer; Frank van Bilsen; Matt Goodman; Eric Alan Barrett; Eric R. Wood; Blake Scottsdale Samuels

Archive | 1996

Low-mass susceptor

Derrick W. Foster; Cornelius A. van der Jeugd; John F. Wengert

Archive | 2000

Process chamber with downstream getter plate

John F. Wengert; Loren R. Jacobs; Michael W. Halpin; Derrick W. Foster; Cornelius A. van der Jeugd; Robert M. Vyne; Mark R. Hawkins

Archive | 1998

Temperature control system for wafer

Derrick W. Foster; Matthew No. Tempe Goodmann; Glenn Hartmann; Loren R. Jacobs; Jason M. Layton; Bilsen Frank B.M. No. Phoenix Van; Der Jeugd Cornelius A. Van; Robert M. Vyne; John F. Wengert

Archive | 1998

Hochtemperatur-prozesskammer mit langer lebensdauer

John F. Wengert; Ivo Raaijmakers; Mike Halpin; Loren R. Jacobs; Michael J. Meyer; Bilsen Frank B.M. No. Phoenix Van; Matt Goodman; Eric Alan Barrett; Eric R. Wood; Blake Scottsdale Samuels

Archive | 1991

Wafer support apparatus

Derrick W. Foster; Matthew G. Goodman; Michael W. Halpin; Glenn Hartmann; Mark R. Hawkins; Loren R. Jacobs; Jason M. Layton; Bilsen Frank B.M. No. Phoenix Van; Der Jeugd Cornelius A. Van; Robert M. Vyne; John F. Wengert

Archive | 1998

Hochtemperatur-prozesskammer mit langer lebensdauer High temperature process chamber with a long service life

Eric Mesa Barrett; Matt Chandler Goodman; Mike Halpin; Loren Mesa Jacobs; Michael J. Meyer; Ivo Phoenix Raaijmakers; Blake Scottsdale Samuels; Bilsen Frank Phoenix Van; John F. Wengert; Eric Mesa Wood

Archive | 1998

Dispositif de support pour tranches

Derrick W. Foster; Robert M. Vyne; John F. Wengert; Der Jeugd Cornelius A. Van; Loren R. Jacobs; Bilsen Frank B.M. No. Phoenix Van; Matthew G. Goodman; Glenn Hartmann; Jason M. Layton; Michael W. Halpin; Mark R. Hawkins

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