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Dive into the research topics where Michael W. Halpin is active.

Publication


Featured researches published by Michael W. Halpin.


Archive | 2000

Wafer support system

Michael W. Halpin; Mark R. Hawkins; Derrick W. Foster; Robert M. Vyne; John F. Wengert; Cornelius A. van der Jeugd; Loren R. Jacobs; Frank van Bilsen; Matthew G. Goodman; Hartmann Glenn; Jason M. Layton


Archive | 1996

Process chamber with inner support

John F. Wengert; Loren R. Jacobs; Michael W. Halpin; Derrick W. Foster; Cornelius A. van der Jeugd; Robert M. Vyne; Mark R. Hawkins


Archive | 1998

Substrate transfer system for semiconductor processing equipment

Ivo Raaijmakers; Loren R. Jacobs; Michael W. Halpin; James A. Alexander; Ken O'neill; Dennis L. Goodwin


Archive | 2014

Susceptor heater and method of heating a substrate

Todd Dunn; Fred Alokozai; Jerry Winkler; Michael W. Halpin


Archive | 2012

Radiation shielding for a substrate holder

Eric Shero; Michael W. Halpin; Jerry Winkler


Archive | 2012

Susceptor heater shim

Todd Dunn; Carl White; Michael W. Halpin; Eric Shero; Jerry Winkler


Archive | 2012

Chamber sealing member

Michael W. Halpin; Eric Shero; Carl White; Fred Alokozai; Jerry Winkler; Todd Dunn


Archive | 2000

Compact process chamber for improved process uniformity

Michael W. Halpin


Archive | 2014

Gas Supply Manifold And Method Of Supplying Gases To Chamber Using Same

Lucian Jdira; Herbert Terhorst; Michael W. Halpin; Carl White; Todd Dunn; Eric Shero; Melvin Verbass; Christopher Wuester; Kyle Fondurulia


Archive | 2001

Heat lamps for zone heating

Ronald R. Stevens; Eric Shero; Ravinder Aggarwal; Michael W. Halpin

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