Jonathan E. Roth

Strong quantum-confined Stark effect in germanium quantum-well structures on silicon

Silicon is the dominant semiconductor for electronics, but there is now a growing need to integrate such components with optoelectronics for telecommunications and computer interconnections. Silicon-based optical modulators have recently been successfully demonstrated; but because the light modulation mechanisms in silicon are relatively weak, long (for example, several millimetres) devices or sophisticated high-quality-factor resonators have been necessary. Thin quantum-well structures made from III-V semiconductors such as GaAs, InP and their alloys exhibit the much stronger quantum-confined Stark effect (QCSE) mechanism, which allows modulator structures with only micrometres of optical path length. Such III-V materials are unfortunately difficult to integrate with silicon electronic devices. Germanium is routinely integrated with silicon in electronics, but previous silicon–germanium structures have also not shown strong modulation effects. Here we report the discovery of the QCSE, at room temperature, in thin germanium quantum-well structures grown on silicon. The QCSE here has strengths comparable to that in III-V materials. Its clarity and strength are particularly surprising because germanium is an indirect gap semiconductor; such semiconductors often display much weaker optical effects than direct gap materials (such as the III-V materials typically used for optoelectronics). This discovery is very promising for small, high-speed, low-power optical output devices fully compatible with silicon electronics manufacture.

Optical modulator on silicon employing germanium quantum wells

We demonstrate an electroabsorption modulator on a silicon substrate based on the quantum confined Stark effect in strained germanium quantum wells with silicon-germanium barriers. The peak contrast ratio is 7.3 dB at 1457 nm for a 10 V swing, and exceeds 3 dB from 1441 nm to 1461 nm. The novel side-entry structure employs an asymmetric Fabry-Perot resonator at oblique incidence. Unlike waveguide modulators, the design is insensitive to positional misalignment, maintaining > 3 dB contrast while translating the incident beam 87 mum and 460 mum in orthogonal directions. Since the optical ports are on the substrate edges, the wafer top and bottom are left free for electrical interconnections and thermal management.

Quantum-Confined Stark Effect in Ge/SiGe Quantum Wells on Si for Optical Modulators

We present observations of quantum confinement and quantum-confined Stark effect (QCSE) electroabsorption in Ge quantum wells with SiGe barriers grown on Si substrates, in good agreement with theoretical calculations. Though Ge is an indirect gap semiconductor, the resulting effects are at least as clear and strong as seen in typical III-V quantum well structures at similar wavelengths. We also demonstrate that the effect can be seen over the C-band around 1.55-mum wavelength in structures heated to 90degC, similar to the operating temperature of silicon electronic chips. The physics of the effects are discussed, including the effects of strain, electron and hole confinement, and exciton binding, and the reasons why the effects should be observable at all in such an indirect gap material. This effect is very promising for practical high-speed, low-power optical modulators fabricated compatible with mainstream silicon electronic integrated circuits

Material Properties of Si-Ge/Ge Quantum Wells

Germanium (Ge) and silicon-germanium (Si-Ge) have the potential to integrate optics with Si IC technology. The quantum-confined Stark effect, a strong electroabsorption mechanism often observed in III-V quantum wells (QWs), has been demonstrated in Si-Ge/Ge QWs, allowing optoelectronic modulators in such group IV materials. Here, based on photocurrent electroabsorption experiments on different samples and fitting of the resulting allowed and nominally forbidden transitions, we propose more accurate values for key parameters such as effective masses and band offsets that are required for device design. Tunneling resonance modeling including conduction band nonparabolicity was used to fit the results with good consistency between the experiments and the fitted transitions.

Ge–SiGe Quantum-Well Waveguide Photodetectors on Silicon for the Near-Infrared

We demonstrate near-infrared waveguide photodetectors using Ge-SiGe quantum wells epitaxially grown on a silicon substrate. The diodes exhibit a low dark current of 17.9 mA/cm2 at 5-V reverse bias. The photodetectors are designed to work optimally at 1480 nm, where the external responsivity is 170 mA/W, which is mainly limited by the fiber-to-waveguide coupling loss. The 1480-nm wavelength matches the optimum wavelength for quantum-well electroabsorption modulators built on the same epitaxy, but these photodetectors also exhibit performance comparable to the demonstrated Ge-based detectors at longer wavelengths. At 1530 nm, we see open eye diagrams at 2.5-Gb/s operation and the external responsivity is as high as 66 mA/W. The technology is potentially integrable with the standard complementary metal-oxide-semiconductor process and offers an efficient solution for on-chip optical interconnects.

Misalignment-tolerant surface-normal low-voltage modulator for optical interconnects

We present a surface-normal modulator architecture for optical interconnects that offers misalignment tolerance as well as high contrast ratio over a wide wavelength range for a small drive voltage. A contrast ratio greater than 3 dB was achieved for only 0.8-V drive across a 16-nm wavelength range from 1498 to 1514 nm. The misalignment tolerance between this device, and the input optical beam was measured to be 30 /spl mu/m.

Measurement and modeling of ultrafast carrier dynamics and transport in germanium/silicon-germanium quantum wells

We measure the intervalley scattering time of electrons in the conduction band of Ge quantum wells from the direct Γ valley to the indirect L valley to be ~185 fs using a pump-probe setup at 1570 nm. We relate this to the width of the exciton peak seen in the absorption spectra of this material, and show that these quantum wells could be used as a fast saturable absorber with a saturation fluence between 0.11 and 0.27 pJ/μm. We also observe field screening by photogenerated carriers in the material on longer timescales. We model this field screening by incorporating carrier escape from the quantum wells, drift across the intrinsic region, and recovery of the applied voltage through diffusive conduction.

Simple Electroabsorption Calculator for Designing 1310 nm and 1550 nm Modulators Using Germanium Quantum Wells

With germanium showing significant promise in the design of electroabsorption modulators for full complementary metal oxide semiconductor integration, we present a simple electroabsorption calculator for Ge/SiGe quantum wells. To simulate the quantum-confined Stark effect electroabsorption profile, this simple quantum well electroabsorption calculator (SQWEAC) uses the tunneling resonance method, 2-D Sommerfeld enhancement, the variational method and an indirect absorption model. SQWEAC simulations are compared with experimental data to validate the model before presenting optoelectronic modulator designs for the important communication bands of 1310 nm and 1550 nm. These designs predict operation with very low energy per bit ( <; 30×fJ/bit).

Indirect absorption in germanium quantum wells

Germanium has become a promising material for creating CMOS-compatible optoelectronic devices, such as modulators and detectors employing the Franz-Keldysh effect (FKE) or the quantum-confined Stark effect(QCSE), which meet strict energy and density requirements for future interconnects. To improve Ge-based modulator design, it is important to understand the contributions to the insertion loss (IL). With indirect absorption being the primary component of IL, we have experimentally determined the strength of this loss and compared it with theoretical models. For the first time, we have used the more sensitive photocurrent measurements for determining the effective absorption coefficient in our Ge/SiGe quantum well material employing QCSE. This measurement technique enables measurement of the absorption coefficient over four orders of magnitude. We find good agreement between our thin Gequantum wells and the bulk material parameters and theoretical models. Similar to bulk Ge, we find that the 27.7 meV LA phonon is dominant in these quantum confined structures and that the electroabsorption profile can be predicted using the model presented by Frova, Phys. Rev., 145 (1966).

An Optical Interconnect Transceiver at 1550 nm Using Low-Voltage Electroabsorption Modulators Directly Integrated to CMOS

A low-voltage, 90-nm CMOS optical interconnect transceiver operating at 1550-nm optical wavelength is presented. This is the first demonstration of a novel optoelectronic modulator architecture (the quasi-waveguide angled-facet electroabsorption modulator) in a system. It features a simple electronic packaging via flip-chip bonding to silicon. Devices have a broad optical bandwidth, are arrayed two dimensionally, and feature surface normal, spatially separated, and misalignment-tolerant optical ports. The modulators are driven with a novel pulsed-cascode driver capable of supplying an output-voltage swing of 2 V (twice the nominal 1-V CMOS supply) without overstressing thin-oxide core CMOS devices. At the receiver side, a sensitivity of -15.2 dBm is obtained with an integrating/double-sampling front end. The transceiver includes clock generation and recovery circuitry that enables a data serialization factor of five. At a maximum data rate of 1.8 Gb/s, the optical transmitter, receiver, and clocking circuitry consume 12.6, 4.5, and 6.5 mW, respectively, for a total link electrical power dissipation of 23.6 mW. To the best of our knowledge, this is the first demonstration of an interconnect transceiver operating at 1550 nm with a III-V output device directly integrated to the CMOS.