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Jozef Kudela

Applied Materials

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Publication

Featured researches published by Jozef Kudela.

Archive | 2012

Guided Wave Applicator with Non-Gaseous Dielectric for Plasma Chamber

Jozef Kudela; Tsutomu Tanaka; Carl A. Sorensen; Suhail Anwar; John M. White

Archive | 2010

RF bus and RF return bus for plasma chamber electrode

Carl A. Sorensen; Jozef Kudela; Robin L. Tiner; Suhail Anwar; John M. White

Archive | 2011

Thin film deposition using microwave plasma

Tae Kyung Won; Helinda Nominanda; Seon-Mee Cho; Soo Young Choi; Beom Soo Park; John M. White; Suhail Anwar; Jozef Kudela

Archive | 2009

Rf return path for large plasma processing chamber

Carl A. Sorensen; John M. White; Jozef Kudela; Jonghoon Baek; Jriyan Jerry Chen; Steve McPherson; Soo Young Choi; Robin L. Tiner

Archive | 2008

Asymmetrical RF Drive for Electrode of Plasma Chamber

Jozef Kudela; Carl A. Sorensen; Soo Young Choi; John M. White

Archive | 2010

Large area plasma processing chamber with at-electrode rf matching

Carl A. Sorensen; John M. White; Jozef Kudela

Archive | 2009

Multi-electrode pecvd source

Jozef Kudela; John M. White

Archive | 2008

Method and apparatus for controlling plasma uniformity

Jozef Kudela; Gaku Furuta; Carl A. Sorensen; Soo Young Choi; John M. White

Archive | 2010

ELECTRODE AND POWER COUPLING SCHEME FOR UNIFORM PROCESS IN A LARGE-AREA PECVD CHAMBER

Jozef Kudela; Tsutomu Tanaka

Archive | 2008

REMOTE INDUCTIVELY COUPLED PLASMA SOURCE FOR CVD CHAMBER CLEANING

Carl A. Sorensen; Jozef Kudela

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John M. White

Applied Materials

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Carl A. Sorensen

Applied Materials

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Suhail Anwar

Applied Materials

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Soo Young Choi

Applied Materials

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Seon-Mee Cho

Applied Materials

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Tsutomu Tanaka

Applied Materials

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Beom Soo Park

Applied Materials

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Dong-Kil Yim

Applied Materials

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Shinichi Kurita

Applied Materials

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Tae Kyung Won

Applied Materials

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