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Carl A. Sorensen

Applied Materials

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Publication

Featured researches published by Carl A. Sorensen.

Archive | 2002

Semiconductor processing using an efficiently coupled gas source

Carl A. Sorensen; Albert R. Ellingboe; Quanyuan Shang; Wendell T. Blonigan; John M. White

Archive | 2012

Guided Wave Applicator with Non-Gaseous Dielectric for Plasma Chamber

Jozef Kudela; Tsutomu Tanaka; Carl A. Sorensen; Suhail Anwar; John M. White

Archive | 2010

RF bus and RF return bus for plasma chamber electrode

Carl A. Sorensen; Jozef Kudela; Robin L. Tiner; Suhail Anwar; John M. White

Archive | 2006

Rf current return path for a large area substrate plasma reactor

Wendell T. Blonigan; Ernst Keller; Carl A. Sorensen

Archive | 1995

Fast transition RF impedance matching network for plasma reactor ignition

Carl A. Sorensen; Wendell T. Blonigan; John M. White

Archive | 1994

Optical pyrometer for a thin film deposition system

Carl A. Sorensen; Wendell T. Blonigan

Archive | 2001

RF matching network with distributed outputs

Wendell T. Blonigan; Carl A. Sorensen

Archive | 1996

Method of depositing a thin film using an optical pyrometer

Carl A. Sorensen; Wendell T. Blonigan

Archive | 2010

Ground return for plasma processes

Soo Young Choi; Robin L. Tiner; Shinichi Kurita; John M. White; Carl A. Sorensen; Jeffrey A. Kho; Suhail Anwar; Makoto Inagawa; Gaku Furuta

Archive | 2009

Rf return path for large plasma processing chamber

Carl A. Sorensen; John M. White; Jozef Kudela; Jonghoon Baek; Jriyan Jerry Chen; Steve McPherson; Soo Young Choi; Robin L. Tiner

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John M. White

Applied Materials

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Jozef Kudela

Applied Materials

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Suhail Anwar

Applied Materials

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Soo Young Choi

Applied Materials

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Wendell T. Blonigan

Applied Materials

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Robin L. Tiner

Applied Materials

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Tsutomu Tanaka

Applied Materials

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Gaku Furuta

Applied Materials

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Jeffrey A. Kho

Applied Materials

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Seon-Mee Cho

Applied Materials

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