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Suhail Anwar

Applied Materials

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Publication

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Archive | 2004

Plasma uniformity control by gas diffuser hole design

Soo Young Choi; John M. White; Qunhua Wang; Li Hou; Ki Woon Kim; Shinichi Kurita; Tae Kyung Won; Suhail Anwar; Beom Soo Park; Robin L. Tiner

Archive | 2012

Guided Wave Applicator with Non-Gaseous Dielectric for Plasma Chamber

Jozef Kudela; Tsutomu Tanaka; Carl A. Sorensen; Suhail Anwar; John M. White

Archive | 2007

Detection and suppression of electrical arcing

Suhail Anwar; Remegio Manacio; Chung-Hee Park; Dong-Kil Yim; Soo Young Choi

Archive | 2010

RF bus and RF return bus for plasma chamber electrode

Carl A. Sorensen; Jozef Kudela; Robin L. Tiner; Suhail Anwar; John M. White

Archive | 2011

Thin film deposition using microwave plasma

Tae Kyung Won; Helinda Nominanda; Seon-Mee Cho; Soo Young Choi; Beom Soo Park; John M. White; Suhail Anwar; Jozef Kudela

Archive | 2006

Multiple slot load lock chamber and method of operation

Shinichi Kurita; Suhail Anwar; Jae-Chull Lee

Archive | 2006

Decoupled chamber body

Jae-Chull Lee; Shinichi Kurita; John M. White; Suhail Anwar

Archive | 2007

System architecture and method for solar panel formation

Shinichi Kurita; Takako Takehara; Suhail Anwar

Archive | 2010

Ground return for plasma processes

Soo Young Choi; Robin L. Tiner; Shinichi Kurita; John M. White; Carl A. Sorensen; Jeffrey A. Kho; Suhail Anwar; Makoto Inagawa; Gaku Furuta

Archive | 2004

Substrate support bushing

Shinichi Kurita; Suhail Anwar; Toshio Kiyotake

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John M. White

Applied Materials

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Shinichi Kurita

Applied Materials

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Robin L. Tiner

Applied Materials

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Soo Young Choi

Applied Materials

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Jozef Kudela

Applied Materials

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Gaku Furuta

Applied Materials

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Carl A. Sorensen

Applied Materials

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Beom Soo Park

Applied Materials

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Makoto Inagawa

Applied Materials

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Jae-Chull Lee

Applied Materials

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