Juan M. Chacin | Researchain

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Publication

Featured researches published by Juan M. Chacin.

Archive | 2005

Film formation apparatus and methods including temperature and emissivity/pattern compensation

Juan M. Chacin; Aaron Muir Hunter; Craig Metzner; Roger N. Anderson

Archive | 2006

Wafer processing hardware for epitaxial deposition with reduced auto-doping and backside defects

Juan M. Chacin; Roger N. Anderson; Kailash Kiran Patalay; Craig Metzner

Archive | 2002

Method and apparatus for planarization of a material by growing a sacrificial film with customized thickness profile

Vedapuram S. Achutharaman; Juan M. Chacin; Hali J. L. Forstner

Archive | 2002

Substrate support assembly and processing apparatus

Juan M. Chacin

Archive | 2002

High temperature anneal with improved substrate support

Ann P. Waldhauer; Juan M. Chacin; Brian H. Burrows

Archive | 2006

Edge temperature compensation in thermal processing particularly useful for SOI wafers

Juan M. Chacin; Sairaju Tallavajula; Sundar Ramamurthy

Archive | 2005

Apparatus temperature control and pattern compensation

Juan M. Chacin; Aaron Muir Hunter; Craig Metzner; Roger N. Anderson

Archive | 2007

MODULAR CVD EPI 300MM REACTOR

Brian H. Burrows; Craig Metzner; Dennis L. Demars; Roger N. Anderson; Juan M. Chacin; David K. Carlson; David Masayuki Ishikawa; Jeffrey Campbell; Richard O. Collins; Keith M. Magill; Imran Afzal

Archive | 2001

ASSEMBLY COMPRISING HEAT DISTRIBUTING PLATE AND EDGE SUPPORT

Juan M. Chacin

Archive | 2009

Modularer, CVD-Epitaxischer, 300 MM Reaktor

Brian H. Burrows; Craig Metzner; Dennis L. Demars; Roger N. Anderson; Juan M. Chacin; David K. Carlson; David Masayuki Ishikawa; Jeffrey Campbell; Richard O. Collins; Keith M. Magill; Imran Afzal

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