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David K. Carlson

Applied Materials

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Publication

Featured researches published by David K. Carlson.

Archive | 2008

Method and apparatus for cleaning a substrate surface

Errol Antonio C. Sanchez; Johanes Swenberg; David K. Carlson; Roison L. Doherty

Archive | 1995

Method for in-situ cleaning of native oxide from silicon surfaces

H. Peter W. Hey; David K. Carlson

Archive | 2007

Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systems

David K. Carlson; Satheesh Kuppurao; Howard Beckford; Herman Diniz; Kailash Kiran Patalay; Brian H. Burrows; Jeffrey Campbell; Zouming Zhu; Xiaowei Li; Errol Antonio C. Sanchez

Archive | 2003

Silicon-containing layer deposition with silicon compounds

Kaushal K. Singh; Paul B. Comita; Lance A. Scudder; David K. Carlson

Archive | 2011

Liner assembly for chemical vapor deposition chamber

David K. Carlson; Mehmet Tugrul Samir; Nyi O. Myo

Archive | 1993

Low temperature etching in cold-wall CVD systems

David K. Carlson; H. Peter W. Hey; James C Hann

Archive | 1991

Apparatus and method for substrate heating utilizing various infrared means to achieve uniform intensity

Roger N. Anderson; Thomas E. Deacon; David K. Carlson

Archive | 1995

Gas inlets for wafer processing chamber

Roger N. Anderson; Peter Hey; David K. Carlson; Mahalingam Venkatesan; Norma B. Riley

Archive | 1995

Low temperature, high pressure silicon deposition method

Israel Beinglass; David K. Carlson

Archive | 2005

Method and apparatus to control semiconductor film deposition characteristics

Satheesh Kuppurao; David K. Carlson; Manish Hemkar; Andrew Lam; Errol Antonio C. Sanchez; Howard Beckford

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Collaboration

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Errol Antonio C. Sanchez

Applied Materials

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Roger N. Anderson

Applied Materials

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Satheesh Kuppurao

Applied Materials

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Norma B. Riley

Applied Materials

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Paul B. Comita

Applied Materials

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H. Peter W. Hey

Applied Materials

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Zhiyuan Ye

Applied Materials

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Herman Diniz

Applied Materials

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Howard Beckford

Applied Materials

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Manish Hemkar

Applied Materials

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