Richard O. Collins | Researchain

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Featured researches published by Richard O. Collins.

Archive | 2003

Apparatus for the deposition of high dielectric constant films

Bobby M. Ronsse; Craig Metzner; Richard O. Collins

Archive | 2013

System and method for pedestal adjustment

Richard O. Collins; Kailash Kiran Patalay; Jean R. Vatus; Zhepeng Cong

Archive | 2009

Cvd reactor with multiple processing levels and dual-axis motorized lift mechanism

Richard O. Collins; Nyi O. Myo; Kevin Joseph Bautista; John S. Webb; Errol C. Sanchez; Yi-Chiau Huang; Kailash Kiran Patalay; Zhi Yuan Zhou; Wilson Yu

Archive | 2012

APPARATUS FOR DEPOSITION OF MATERIALS ON A SUBSTRATE

Errol Antonio C. Sanchez; Richard O. Collins; David K. Carlson; Kevin Joseph Bautista; Herman Diniz; Kailash Kiran Patalay; Nyi O. Myo; Dennis L. Demars; Christophe Marcadal; Steve Jumper; Satheesh Kuppurao

Archive | 2008

Non-contact substrate support position sensing system and corresponding adjustments

Kailash Kiran Patalay; Richard O. Collins; Jean R. Vatus; Zhepeng Cong

Archive | 2013

METHOD AND APPARATUS FOR PRECURSOR DELIVERY

Errol Antonio C. Sanchez; Marcel E. Josephson; Jaidev Rajaram; Richard O. Collins; David K. Carlson

Archive | 2015

SUSCEPTOR DESIGN TO REDUCE EDGE THERMAL PEAK

Schubert S. Chu; Anhthu Ngo; Karthik Ramanathan; Nitin Pathak; Nyi O. Myo; Paul Brillhart; Richard O. Collins; Kevin Joseph Bautista; Edric Tong; Zhepeng Cong; Anzhong Chang; Kin Pong Lo; Manish Hemkar

Archive | 2007

MODULAR CVD EPI 300MM REACTOR

Brian H. Burrows; Craig Metzner; Dennis L. Demars; Roger N. Anderson; Juan M. Chacin; David K. Carlson; David Masayuki Ishikawa; Jeffrey Campbell; Richard O. Collins; Keith M. Magill; Imran Afzal

Archive | 2017