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Juergen Reich

KLA-Tencor

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Publication

Featured researches published by Juergen Reich.

Archive | 2007

Methods and systems for detecting pinholes in a film formed on a wafer or for monitoring a thermal process tool

David Chen; Andrew Steinbach; Daniel Kavaldjiev; Alexander Belyaev; Juergen Reich

Archive | 2008

Computer-implemented methods for inspecting and/or classifying a wafer

Juergen Reich; Louis Vintro; Prasanna Dighe; Andrew Steinbach; Daniel Kavaldjiev; Stephen Biellak

Archive | 2012

Large particle detection for multi-spot surface scanning inspection systems

Juergen Reich; Charles Amsden; Jiayao Zhang; Christian Wolters

Archive | 2005

Methods and systems for determining drift in a position of a light beam with respect to a chuck

Juergen Reich; Yevgeny Kruptesky; Christian Wolters

Archive | 2012

Surface Scanning Inspection System With Adjustable Scan Pitch

Christian Wolters; Juergen Reich

Archive | 2013

Inspection beam shaping for improved detection sensitivity

Christian Wolters; Zhiwei Xu; Juergen Reich

Archive | 2013

Monitoring Incident Beam Position in a Wafer Inspection System

Juergen Reich; Aleksey Petrenko; Richard Fong; Bret Whiteside; Jien Cao; Christian Wolters; Anatoly Romanovsky; Daniel Kavaldjiev

Archive | 2014

Multi-Spot Defect Inspection System

Zhiwei Xu; Christian Wolters; Juergen Reich; Bret Whiteside; Guoheng Zhao; Jijen Vazhaeparambil; Stephen Biellak; Sam Shamouilian; Mehdi Vaez-Iravani

Archive | 2013

Monolithic optical beam splitter with focusing lens

Bret Whiteside; Patrick Czarnota; Juergen Reich; Sam Shamouilian

Archive | 2012

Détection de grande particule pour systèmes d'inspection à balayage de surface multipoint

Juergen Reich; Charles Amsden; Jiayao Zhang; Christian Wolters

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Collaboration

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Christian Wolters

KLA-Tencor

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Bret Whiteside

KLA-Tencor

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Daniel Kavaldjiev

KLA-Tencor

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Alexander Belyaev

KLA-Tencor

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Andrew Steinbach

KLA-Tencor

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Charles Amsden

KLA-Tencor

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David Chen

KLA-Tencor

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Jiayao Zhang

KLA-Tencor

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Jien Cao

KLA-Tencor

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Louis Vintro

KLA-Tencor

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