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Publication


Featured researches published by Jun-Gyu Ryu.


Archive | 2005

Polishing head of chemical mechanical polishing apparatus and polishing method using the same

Jae-Phil Boo; Jong-Soo Kim; Jun-Gyu Ryu; Sang-seon Lee; Sun-wung Lee


Archive | 2003

Apparatus for polishing a semiconductor wafer and method therefor

Jae-Phil Boo; Jun-Gyu Ryu; Sang-seon Lee; Sun-wung Lee


Archive | 2003

Polishing station of a chemical mechanical polishing apparatus

Jae-Phil Boo; Jun-Gyu Ryu; Hyun-Sung Lee


Archive | 1997

Wafer polishing apparatus and wafer polishing method

Jae-Phil Boo; Sang-seon Lee; Sun-wung Lee; Jun-Gyu Ryu; 在弼 夫; 善雄 李; 湘先 李; 俊圭 柳


Archive | 2007

METHOD FOR POLISHING A SEMICONDUCTOR WAFER

Jae-Phil Boo; Jun-Gyu Ryu; Sang-seon Lee; Sun-wung Lee


Archive | 2005

Apparatus for polishing a semiconductor wafer

Jae-Phil Boo; Jun-Gyu Ryu; Sang-seon Lee; Sun-wung Lee


Archive | 2001

Polierkopf für einen Wafer und Polierverfahren unter Verwendung desselben

Jae-Phil Boo; Sang-seon Lee; Sung-Wung Lee; Jun-Gyu Ryu


Archive | 2006

Apparatus and methods for polishing a semiconductor wafer

Jae-Phil Boo; Jun-Gyu Ryu; Sang-seon Lee; Sun-wung Lee


Archive | 2001

Polishing machine for semiconductor wafers includes two-chamber carrier system with membrane and openings in correspondence

Jae-Phil Boo; Jun-Gyu Ryu; Sang-seon Lee; Sung-Wung Lee


Archive | 2001

Vorrichtung zum Polieren eines Halbleiterwafers und Verfahren dafür An apparatus for polishing a semiconductor wafer and method thereof

Jae-Phil Boo; Sang-seon Lee; Sung-Wung Lee; Jun-Gyu Ryu

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