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Jae-Phil Boo

Samsung

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Publication

Featured researches published by Jae-Phil Boo.

Archive | 2001

Method for fabricating MOS transistor using selective silicide process

Sun-wung Lee; Jae-Phil Boo; Kyung-hyun Kim; Chang-Ki Hong

Archive | 2005

Polishing head of chemical mechanical polishing apparatus and polishing method using the same

Jae-Phil Boo; Jong-Soo Kim; Jun-Gyu Ryu; Sang-seon Lee; Sun-wung Lee

Archive | 2007

Apparatus and method for treating substrates

Chan-Woo Cho; Jae-Phil Boo; Myung-Seok Kim; Jong-Muk Kang; Ik-Joo Kim; Jung-Hwan Sung; Ki-Hong Jung; Keon-Sik Seo

Archive | 2003

Apparatus for polishing a semiconductor wafer and method therefor

Jae-Phil Boo; Jun-Gyu Ryu; Sang-seon Lee; Sun-wung Lee

Archive | 2003

Polishing station of a chemical mechanical polishing apparatus

Jae-Phil Boo; Jun-Gyu Ryu; Hyun-Sung Lee

Archive | 2001

Method of fabricating a non-volatile memory device having a tunnel-insulating layer including more than two portions of different thickness

Jae-Phil Boo; Soo-Young Tak; Kwang-Bok Kim; Kyung-hyun Kim; Chang-ki Hong

Archive | 2005

Apparatus and method for treating susbtrates

Chan-Woo Cho; Jae-Phil Boo; Myung-Seok Kim; Jong-Muk Kang; Ik-Joo Kim; Jung-Hwan Sung; Ki-Hong Jung; Keon-Sik Seo

Archive | 1997

Wafer polishing apparatus and wafer polishing method

Jae-Phil Boo; Sang-seon Lee; Sun-wung Lee; Jun-Gyu Ryu; 在弼 夫; 善雄 李; 湘先 李; 俊圭 柳

Archive | 2004

Carrier head of chemical mechanical polishing apparatus having barriers dividing pressure chamber into a plurality of pressure zones

Jae-Phil Boo; Jue-Young Lee

Archive | 2007

METHOD FOR POLISHING A SEMICONDUCTOR WAFER

Jae-Phil Boo; Jun-Gyu Ryu; Sang-seon Lee; Sun-wung Lee

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Collaboration

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Jun-Gyu Ryu

Samsung

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Sang-seon Lee

Samsung

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Sun-wung Lee

Samsung

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Sung-Wung Lee

Samsung

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Keon-Sik Seo

Samsung

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Ik-Joo Kim

Samsung

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Jong-Muk Kang

Samsung

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Ki-Hong Jung

Samsung

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Kwang-Bok Kim

Samsung

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Kyung-hyun Kim

Samsung

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