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Sang-seon Lee

Samsung

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Publication

Featured researches published by Sang-seon Lee.

Archive | 2005

Polishing head of chemical mechanical polishing apparatus and polishing method using the same

Jae-Phil Boo; Jong-Soo Kim; Jun-Gyu Ryu; Sang-seon Lee; Sun-wung Lee

Archive | 2003

Apparatus for polishing a semiconductor wafer and method therefor

Jae-Phil Boo; Jun-Gyu Ryu; Sang-seon Lee; Sun-wung Lee

Archive | 1997

Wafer polishing apparatus and wafer polishing method

Jae-Phil Boo; Sang-seon Lee; Sun-wung Lee; Jun-Gyu Ryu; 在弼 夫; 善雄 李; 湘先 李; 俊圭 柳

Archive | 1998

Wafer polishing apparatus having measurement device and polishing method

Sang-seon Lee; Jeong-kon Kim

Archive | 2007

METHOD FOR POLISHING A SEMICONDUCTOR WAFER

Jae-Phil Boo; Jun-Gyu Ryu; Sang-seon Lee; Sun-wung Lee

Archive | 2005

Apparatus for polishing a semiconductor wafer

Jae-Phil Boo; Jun-Gyu Ryu; Sang-seon Lee; Sun-wung Lee

Archive | 2001

Polierkopf für einen Wafer und Polierverfahren unter Verwendung desselben

Jae-Phil Boo; Sang-seon Lee; Sung-Wung Lee; Jun-Gyu Ryu

Archive | 2006

Apparatus and methods for polishing a semiconductor wafer

Jae-Phil Boo; Jun-Gyu Ryu; Sang-seon Lee; Sun-wung Lee

Archive | 2001

Polishing machine for semiconductor wafers includes two-chamber carrier system with membrane and openings in correspondence

Jae-Phil Boo; Jun-Gyu Ryu; Sang-seon Lee; Sung-Wung Lee

Archive | 2016

Carrier Head, Chemical Mechanical Polishing Apparatus and Wafer Polishing Method

Jong-bok Kim; Junho Ban; Sang-seon Lee

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Collaboration

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Jae-Phil Boo

Samsung

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Jun-Gyu Ryu

Samsung

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Sun-wung Lee

Samsung

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Sung-Wung Lee

Samsung

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Jong-bok Kim

Samsung

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Hyun-Joo Yun

Samsung

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Hyun-Sung Lee

Samsung

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Kwang-Hee Lee

Samsung

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Min-Su Kim

Samsung

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Jeong-kon Kim

Samsung

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