Jun Yamawaku

Nano-thickness Stellar Defects

New type defects which are nanometer-thickness stellar shape defects called as the stellar defects are reported. Since the stellar defects need the center particle and the water to form, we successfully have reduced the stellar defects by reducing the particles and humidity in the chamber. These very thin defects must be key issues in the processes that we have to control nanometer thickness.

Vacuum chamber fast dehumidification ∼Water control in semiconductor manufacturing equipment∼

Water residues become a serious problem in semiconductor manufacturing systems. In this paper, one of the methods to dehumidify in process chamber is proposed and demonstrated. With this technique, conventional evacuation time can be improved by 2times to 3times. We also demonstrated influence of water adsorbed on wafer.