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Shigehiro Miura

Tokyo Electron

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Publication

Featured researches published by Shigehiro Miura.

Archive | 2013

FILM DEPOSITION APPARATUS, SUBSTRATE PROCESSING APPARATUS AND FILM DEPOSITION METHOD

Jun Yamawaku; Chishio Koshimizu; Mitsuhiro Tachibana; Hitoshi Kato; Takeshi Kobayashi; Shigehiro Miura; Takafumi Kimura

Archive | 2014

FILM DEPOSITION APPARATUS, AND METHOD OF DEPOSITING A FILM

Hitoshi Kato; Shigehiro Miura

Archive | 2013

PLASMA PROCESS APPARATUS AND PLASMA GENERATING DEVICE

Hitoshi Kato; Shigehiro Miura

Archive | 2013

FILM FORMATION DEVICE, SUBSTRATE PROCESSING DEVICE, AND FILM FORMATION METHOD

Jun Yamawaku; Chishio Koshimizu; Yohei Yamazawa; Mitsuhiro Tachibana; Hitoshi Kato; Takeshi Kobayashi; Shigehiro Miura; Takafumi Kimura

Archive | 2013

METHOD OF OPERATING FILM DEPOSITION APPARATUS AND FILM DEPOSITION APPARATUS

Hitoshi Kato; Shigehiro Miura

Archive | 2013

Film deposition apparatus and method of depositing film

Hitoshi Kato; Shigehiro Miura

Archive | 2016

METHOD AND APPARATUS FOR DEPOSITING A SILICON-CONTAINING FILM

Jun Sato; Hiroyuki Kikuchi; Masahiro Murata; Shigehiro Miura

Archive | 2015

METHOD FOR PROCESSING A SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS

Hitoshi Kato; Jun Sato; Masahiro Murata; Kentaro Oshimo; Tomoko Sugano; Shigehiro Miura

Archive | 2014

SUBSTRATE PROCESSING APPARATUS AND METHOD OF DEPOSITING A FILM

Jun Yamawaku; Chishio Koshimizu; Mitsuhiro Tachibana; Hitoshi Kato; Takeshi Kobayashi; Shigehiro Miura; Takafumi Kimura

Archive | 2017

Method And Apparatus For Depositing Silicon-containing Film

Masahiro Murata; Hiroyuki Kikuchi; Jun Sato; Shigehiro Miura

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Collaboration

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Hitoshi Kato

Tokyo Electron

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Takeshi Kobayashi

Tokyo Electron

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Jun Sato

Toyota

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Chishio Koshimizu

Wakayama University

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Mitsuhiro Tachibana

Tokyo Electron

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Takafumi Kimura

Tokyo Electron

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Hisashi Kato

Tohoku Electric Power

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Masahiro Murata

Tokyo Electron

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Jun Yamawaku

Tokyo Electron

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Hiroyuki Kikuchi

Tokyo Electron

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