Juwen Gao
Lam Research
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Publication
Featured researches published by Juwen Gao.
Applied Physics Letters | 2015
Oren Zonensain; Sivan Fadida; Ilanit Fisher; Juwen Gao; Kaushik Chattopadhyay; Greg Harm; Tom Mountsier; Michal Danek; M. Eizenberg
One of the main challenges facing the integration of metals as gate electrodes in advanced MOS devices is control over the Fermi level position at the metal/dielectric interface. In this study, we demonstrate the ability to tune the effective work function (EWF) of W-based electrodes by process modifications of the atomic layer deposited (ALD) films. Tungsten carbo-nitrides (WCxNy) films were deposited via plasma-enhanced and/or thermal ALD processes using organometallic precursors. The process modifications enabled us to control the stoichiometry of the WCxNy films. Deposition in hydrogen plasma (without nitrogen based reactant) resulted in a stoichiometry of WC0.4 with primarily W-C chemical bonding, as determined by x-ray photoelectron spectroscopy. These films yielded a relatively low EWF of 4.2 ± 0.1 eV. The introduction of nitrogen based reactant to the plasma or the thermal ALD deposition resulted in a stoichiometry of WC0.1N0.6–0.8 with predominantly W-N chemical bonding. These films produced a hi...
Journal of Applied Physics | 2018
Oren Zonensain; Sivan Fadida; Ilanit Fisher; Juwen Gao; Michal Danek; M. Eizenberg
This study is a thorough investigation of the chemical, structural, and electrical stability of W based organo-metallic films, grown by atomic layer deposition, for future use as gate electrodes in advanced metal oxide semiconductor structures. In an earlier work, we have shown that high effective work-function (4.7 eV) was produced by nitrogen enriched films (WCxNy) dominated by W-N chemical bonding, and low effective work-function (4.2 eV) was produced by hydrogen plasma resulting in WCx films dominated by W-C chemical bonding. In the current work, we observe, using x-ray diffraction analysis, phase transformation of the tungsten carbide and tungsten nitride phases after 900 °C annealing to the cubic tungsten phase. Nitrogen diffusion is also observed and is analyzed with time-of-flight secondary ion mass spectroscopy. After this 900 °C anneal, WCxNy effective work function tunability is lost and effective work-function values of 4.7–4.8 eV are measured, similar to stable effective work function values ...
Archive | 2003
Karl B. Levy; Jung Hwan Sung; Kaihan A. Ashtiani; James A Fair; Joshua Collins; Juwen Gao
Archive | 2014
Anand Chandrashekar; Esther Jeng; Raashina Humayun; Michal Danek; Juwen Gao; Deqi Wang
Archive | 2003
Sang-Hyeob Lee; Karl B. Levy; Aaron R. Fellis; Panya Wongsenakhum; Juwen Gao; Joshua Collins; Kaihan A. Ashtiani; Junghwan Sung; Lana Hiului Chan
Archive | 2004
Panya Wongsenakhum; Aaron R. Fellis; Kaihan A. Ashtiani; Karl B. Levy; Juwen Gao; Joshua Collins; Junghwan Sung; Lana Hiului Chan
Archive | 2007
Juwen Gao; Lana Hiului Chan; Panya Wongsenakhum
Archive | 2006
Panya Wongsenakhum; Juwen Gao; Joshua Collins
Archive | 2010
Michal Danek; Tom Mountsier; Jonathan D. Reid; Juwen Gao; Aaron R. Fellis
Archive | 2009
Juwen Gao; Wei Lei; Michal Danek; Erich Klawuhn; Sean Chang; Ron Powell