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Joshua Collins

Applied Materials

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Publication

Featured researches published by Joshua Collins.

Archive | 2008

Adsorption based material removal process

Xinye Liu; Joshua Collins; Kaihan A. Ashtiani

Archive | 2003

Deposition of tungsten nitride

Karl B. Levy; Jung Hwan Sung; Kaihan A. Ashtiani; James A Fair; Joshua Collins; Juwen Gao

Archive | 2012

METHOD FOR PRODUCING ULTRA-THIN TUNGSTEN LAYERS WITH IMPROVED STEP COVERAGE

Sang-Hyeob Lee; Joshua Collins

Archive | 2003

Method for reducing tungsten film roughness and improving step coverage

Sang-Hyeob Lee; Karl B. Levy; Aaron R. Fellis; Panya Wongsenakhum; Juwen Gao; Joshua Collins; Kaihan A. Ashtiani; Junghwan Sung; Lana Hiului Chan

Archive | 2004

Method of forming low-resistivity tungsten interconnects

Panya Wongsenakhum; Aaron R. Fellis; Kaihan A. Ashtiani; Karl B. Levy; Juwen Gao; Joshua Collins; Junghwan Sung; Lana Hiului Chan

Archive | 2013

Tungsten deposition sequence

Benjamin C. Wang; Amit Khandelwal; Avegerinos V. Gelatos; Joshua Collins; Kedar Sapre; Nitin K. Ingle

Archive | 2013

BORON IONIZATION FOR ALUMINUM OXIDE ETCH ENHANCEMENT

Kai Wu; Sang Ho Yu; Kie Jin Park; Glen T. Mori; Joshua Collins

Archive | 2009

Methods for growing low-resistivity tungsten film

Lana Hiului Chan; Panya Wongsenakhum; Joshua Collins

Archive | 2011

Methods for growing low-resistivity tungsten for high aspect ratio and small features

Lana Hiului Chan; Kaihan A. Ashtiani; Joshua Collins

Archive | 2006

Reducing silicon attack and improving resistivity of tungsten nitride film

Panya Wongsenakhum; Juwen Gao; Joshua Collins

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Collaboration

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Sang-Hyeob Lee

Applied Materials

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Juwen Gao

Lam Research

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Kai Wu

Applied Materials

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Benjamin C. Wang

Applied Materials

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Kie Jin Park

Applied Materials

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Sang Ho Yu

Applied Materials

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Amit Khandelwal

Applied Materials

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Avgerinos V. Gelatos

Applied Materials

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David T. Or

Applied Materials

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Kazuya Daito

Applied Materials

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