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Dive into the research topics where Kai Yang is active.

Publication


Featured researches published by Kai Yang.


Archive | 1998

Method of preventing copper dendrite formation and growth

Diana M. Schonauer; Steven C. Avanzino; Kai Yang


Archive | 1999

Method of fabricating improved copper metallization including forming and removing passivation layer before forming capping film

Steven C. Avanzino; Kai Yang; Sergey Lopatin; Todd P. Lukanc


Archive | 1998

Chemically removable Cu CMP slurry abrasive

Steven C. Avanzino; Darrell M. Erb; Diana M. Schonauer; Kai Yang


Archive | 1998

Copper dendrite prevention by chemical removal of dielectric

Diana M. Schonauer; Steven C. Avanzino; Kai Yang


Archive | 2001

Stabilizing fluorine etching of low-k materials

Kai Yang; Darrell M. Erb; Fei Wang


Electrochemical and Solid State Letters | 1999

THE IMPACT OF LINEWIDTH AND LINE DENSITY ON THE TEXTURE OF ELECTROPLATED CU IN DAMASCENE-FABRICATED LINES

Linda Vanasupa; David Pinck; Young-Chang Joo; Takeshi Nogami; Shekhar Pramanick; Sergey Lopatin; Kai Yang


Archive | 1998

Preventing Cu dendrite formation and growth

Diana M. Schonauer; Steven C. Avanzino; Kai Yang


Archive | 1998

Chemically preventing copper dendrite formation and growth by spraying

Diana M. Schonauer; Steven C. Avanzino; Kai Yang


Archive | 1998

Chemical treatment for preventing copper dendrite formation and growth

Diana M. Schonauer; Steven C. Avanzino; Kai Yang


Archive | 1998

Chemically preventing Cu dendrite formation and growth by double sided scrubbing

Diana M. Schonauer; Steven C. Avanzino; Kai Yang

Collaboration


Dive into the Kai Yang's collaboration.

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Fei Wang

Advanced Micro Devices

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David Pinck

California Polytechnic State University

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Linda Vanasupa

California Polytechnic State University

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