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Diana M. Schonauer

Advanced Micro Devices

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Publication

Featured researches published by Diana M. Schonauer.

Archive | 2002

Interconnect structure formed in porous dielectric material with minimized degradation and electromigration

Sergey Lopatin; Fei Wang; Diana M. Schonauer; Steven C. Avanzino

Archive | 1997

Chemical-mechanical polishing slurry formulation and method for tungsten and titanium thin films

Stephen C. Avanzino; Christy Mei-Chu Woo; Diana M. Schonauer; Peter A. Burke

Archive | 1995

Chemical solutions for removing metal-compound contaminants from wafers after CMP and the method of wafer cleaning

Diana M. Schonauer; Steven C. Avanzino

Archive | 1998

Method of preventing copper dendrite formation and growth

Diana M. Schonauer; Steven C. Avanzino; Kai Yang

Archive | 2000

Prevention of precipitation defects on copper interconnects during CMP by use of solutions containing organic compounds with silica adsorption and copper corrosion inhibiting properties

Kashmir Sahota; Diana M. Schonauer; Johannes Groschopf; Gerd Marxsen; Steven C. Avanzino

Archive | 1999

TA BARRIER SLURRY CONTAINING AN ORGANIC ADDITIVE

Kashmir Sahota; Diana M. Schonauer; Steven C. Avanzino

Archive | 1998

Chemically removable Cu CMP slurry abrasive

Steven C. Avanzino; Darrell M. Erb; Diana M. Schonauer; Kai Yang

Archive | 1998

Copper dendrite prevention by chemical removal of dielectric

Diana M. Schonauer; Steven C. Avanzino; Kai Yang

Archive | 1995

Method of making a chemical-mechanical polishing slurry and the polishing slurry

Steven C. Avanzino; Christy Mei-Chu Woo; Diana M. Schonauer; Peter A. Burke

Archive | 1995

Reduced chemical-mechanical polishing particulate contamination

Isidore Salugsugan; Diana M. Schonauer

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Steven C. Avanzino

Advanced Micro Devices

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Kai Yang

Advanced Micro Devices

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Christy Mei-Chu Woo

Advanced Micro Devices

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Kashmir Sahota

Advanced Micro Devices

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Peter A. Burke

Advanced Micro Devices

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Stephen C. Avanzino

Advanced Micro Devices

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Amit P. Marathe

Advanced Micro Devices

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Bhanwar Singh

Advanced Micro Devices

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Christy Mei-Chu Woo de la Girond'arc

Advanced Micro Devices

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Darin A. Chan

Advanced Micro Devices

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