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Kamm Frank-Michael

Infineon Technologies

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Publication

Featured researches published by Kamm Frank-Michael.

Archive | 2004

Verfahren und Anordnung zur Kompensation von Unebenheiten in der Oberfläche eines Substrates

Kamm Frank-Michael

Archive | 2004

Reflektierender Spiegel zur lithographischen Belichtung und Herstellungsverfahren

Rau Jenspeter; Kamm Frank-Michael

Archive | 2004

Reflection mask for projecting a structure onto a semiconductor wafer and method for producing the mask

Kamm Frank-Michael

Archive | 2006

REFLECTIVE MASK, METHOD OF USING THE REFLECTIVE MASK, AND METHOD OF MANUFACTURING THE REFLECTIVE MASK

Kamm Frank-Michael; Pforr Rainer; Crell Christian

Archive | 2007

Anordnung zur Projektion eines Musters von einer EUV-Maske auf ein Substrat

Pforr Rainer; Kamm Frank-Michael

Archive | 2006

Verfahren zum Bestimmen einer optimalen Absorber-Schichtenstapelgeometrie für eine lithographische Reflexionsmaske

Hirscher Stefan; Kamm Frank-Michael

Archive | 2004

Schutzvorrichtung für lithographische Masken und Verfahren zu ihrer Verwendung

Schilz Christof Matthias; Kamm Frank-Michael

Archive | 2007

APPARATUS FOR PROJECTING PATTERN ON SUBSTRATE FROM EUV MASK, AND METHOD OF MANUFACTURING SAME

Kamm Frank-Michael; Pforr Rainer

Archive | 2008

Verfahren zur Herstellung einer Reflexionsmaske

Kamm Frank-Michael; Pforr Rainer; Crell Christian

Archive | 2007

Arrangement and method for the projection of a pattern from a mask onto a substrate

Kamm Frank-Michael; Pforr Rainer

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Collaboration

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Pforr Rainer

Infineon Technologies

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Ehrmann Albrecht

Infineon Technologies

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Haugeneder Ernst

Infineon Technologies

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Letzkus Florian

Infineon Technologies

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Loeschner Hans

Infineon Technologies

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Rau Jenspeter

Infineon Technologies

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Schilz Christof Matthias

Infineon Technologies

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Springer Reinhard

Infineon Technologies

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Butschke Joerg

Infineon Technologies

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Hennig Mario

Infineon Technologies

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