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Pforr Rainer

Infineon Technologies

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Publication

Featured researches published by Pforr Rainer.

Archive | 2006

REFLECTIVE MASK, METHOD OF USING THE REFLECTIVE MASK, AND METHOD OF MANUFACTURING THE REFLECTIVE MASK

Kamm Frank-Michael; Pforr Rainer; Crell Christian

Archive | 2007

Anordnung zur Projektion eines Musters von einer EUV-Maske auf ein Substrat

Pforr Rainer; Kamm Frank-Michael

Archive | 1999

Übertragung eines Musters hoher Strukturdichte durch multiple Belichtung weniger dichter Teilmuster

Pforr Rainer; Gans Fritz

Archive | 2007

APPARATUS FOR PROJECTING PATTERN ON SUBSTRATE FROM EUV MASK, AND METHOD OF MANUFACTURING SAME

Kamm Frank-Michael; Pforr Rainer

Archive | 2006

STRUCTURE FOR PROJECTING PATTERN ON IMAGE SURFACE

Moukara Molela; Pforr Rainer; Muelders Thomas; Hennig Mario; Zeiler Karsten

Archive | 2006

ARRANGEMENT FOR PROJECTING A PATTERN INTO AN IMAGE PLANE

Moukara Molela; Pforr Rainer; Muelders Thomas; Hennig Mario; Zeiler Karsten

Archive | 2013

LITHOGRAPHIC MASK AND METHOD OF MANUFACTURING LITHOGRAPHIC MASK

Rolff Haiko; Byloos Carla; Noelscher Christoph; Morgana Nicolo; Koehle Roderick; Moukara Molela; Neubauer Ralf; Pforr Rainer; Savignac Dominique

Archive | 2010

LITHOGRAPHY MASK, AND MANUFACTURING METHOD OF LITHOGRAPHY MASK

Rolff Haiko; Byloos Carla; Noelscher Christoph; Morgana Nicolo; Koehle Roderick; Moukara Molela; Neubauer Ralf; Pforr Rainer; Savignac Dominique

Archive | 2009

Lithographiemaske, Verwendung der Lithographiemaske und Verfahren zur Herstellung der Lithographiemaske

Pforr Rainer; Muelders Thomas; Crell Christian; Bauch Lothar; Ziebold Ralf; Moeller Holger; Graeser Annett

Archive | 2008

Verfahren zur Herstellung einer Reflexionsmaske

Kamm Frank-Michael; Pforr Rainer; Crell Christian

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Hennig Mario

Infineon Technologies

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Koehle Roderick

Infineon Technologies

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Kamm Frank-Michael

Infineon Technologies

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Noelscher Christoph

Infineon Technologies

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Moukara Molela

Infineon Technologies

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Kunkel Gerhard

Infineon Technologies

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Voigt Ina

Infineon Technologies

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Thiele Joerg

Infineon Technologies

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Zeiler Karsten

Infineon Technologies

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Gans Fritz

Infineon Technologies

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