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Dive into the research topics where Kanai Saburo is active.

Publication


Featured researches published by Kanai Saburo.


Archive | 1998

Device and method for processing plasma

Nishio Ryoji; Yoshioka Takeshi; Kanai Saburo; Kanekiyo Takamitsu; Kihara Hideki; Okuda Koji


Archive | 2003

Wafer treatment device and wafer stage, and wafer treatment method

Sugano Seiichiro; Kawahara Hironori; Suehiro Mitsuru; Kanai Saburo; Masuda Toshio


Archive | 1999

Electrostatic chucking apparatus and apparatus for processing sample using the same

Sugano Seiichiro; Usui Taketo; Yoshioka Takeshi; Kanai Saburo; Takahashi Nushito


Archive | 2001

HIGH FREQUENCY DISCHARGE DEVICE AND PLASMA TREATMENT METHOD

Nishio Ryoji; Ikenaga Kazuyuki; Yoshioka Takeshi; Suzuki Shinichi; Kuroki Keiji; Kanai Saburo


Archive | 2002

METHOD FOR ETCHING SAMPLE

Yoshioka Takeshi; Fujimoto Kotaro; Sato Takashi; Kanekiyo Takamitsu; Kanai Saburo


Archive | 1997

PLASMA PRODUCING DEVICE, MANUFACTURE OF SEMICONDUCTOR ELEMENT USING IT, AND SEMICONDUCTOR ELEMENT

Tanaka Junichi; Nishio Ryoji; Doi Akira; Tetsuka Tsutomu; Usui Taketo; Kaji Tetsunori; Yoshioka Takeshi; Kanai Saburo


Archive | 2001

WAFER PROCESSING DEVICE AND METHOD OF MANUFACTURING WAFER

Sugano Seiichiro; Enami Hiromitsu; Suzuki Shinichi; Katsuyama Masanori; Yoshioka Takeshi; Kanai Saburo; Nishio Ryoji; Usui Taketo; Kawada Hiroteru; Ikenaga Kazuyuki


Archive | 2001

TEST PIECE PROCESSING METHOD, APPARATUS THEREFOR, AND METHOD FOR MANUFACTURE OF MAGNETIC HEAD

Yoshioka Takeshi; Torii Zenzo; Fuyama Moriaki; Okada Toshihiro; Kanai Saburo; Usui Taketo; Harada Hitoshi


Archive | 1999

VACUUM TREATMENT APPARATUS AND TREATMENT STAGE

Sumiya Masanori; Kanai Saburo; Ito Yoichi; Fujii Takashi; Kawahara Hironori; Hamazaki Ryoji; Takahashi Nushito; Kikkai Motohiko


Archive | 1996

PLASMA TREATMENT APPARATUS AND CONTROL METHOD

Takahashi Nushito; Nawata Makoto; Usui Taketo; Kanai Saburo; Kaji Tetsunori

Collaboration


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