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Featured researches published by Kawasaki Yoshinao.


Archive | 1982

METHOD AND APPARATUS FOR DRY ETCHING

Fukuyama Ryoji; Nakazato Norio; Kakehi Yutaka; Nawata Makoto; Kawahara Hironori; Ito Atsushi; Kawasaki Yoshinao


Archive | 1986

Microwave plasma treater

Kawasaki Yoshinao; Kudo Katsuyoshi; Soraoka Minoru; Tsubone Tsunehiko; Kawahara Hironori


Archive | 1986

Microwave plasma processing method and its device

Fukuyama Ryoji; Kakehi Yutaka; Usui Taketo; Kawasaki Yoshinao; Nojiri Kazuo; Ishimaru Kimiyuki


Archive | 1986

Method and apparatus for reduced pressure processing

Kawasaki Yoshinao; Kudo Katsuyoshi; Soraoka Minoru; Tsubone Tsunehiko; Kawahara Hironori


Archive | 1992

METHOD AND EQUIPMENT FOR DRY ETCHING

Izawa Masaru; Taji Shinichi; Hamazaki Ryoji; Kawahara Hironori; Kawasaki Yoshinao; Tsujimoto Kazunori; Kure Tokuo


Archive | 1990

Method and device for vacuum treatment

Watanabe Seiichi; Kakehi Yutaka; Akiba Masakuni; Kawasaki Yoshinao


Archive | 1987

METHOD FOR DETERMINATING END POINT OF ETCHING

Ikuhara Shiyouji; Tada Keiji; Kawasaki Yoshinao; Kudo Katsuyoshi; Soraoka Minoru


Archive | 1999

PLASMA END-POINT JUDGING METHOD

Kakehi Yutaka; Omoto Yutaka; Ueyama Keiji; Kawasaki Yoshinao; Ito Atsushi


Archive | 1998

Method and device for dry etching

Izawa Masaru; Tachi Shinichi; Tsujimoto Kazunori; Kure Tokuo; Kawahara Hironobu; Hamasaki Ryouji; Kawasaki Yoshinao


Archive | 1990

SAMPLE TREATMENT METHOD END DEVICE

Kawasaki Yoshinao; Kawahara Hironori; Sato Hitoaki; Fukuyama Ryoji; Nojiri Kazuo; Torii Zenzo

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