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Publication


Featured researches published by Nawata Makoto.


Archive | 1982

METHOD AND APPARATUS FOR DRY ETCHING

Fukuyama Ryoji; Nakazato Norio; Kakehi Yutaka; Nawata Makoto; Kawahara Hironori; Ito Atsushi; Kawasaki Yoshinao


Archive | 1984

WAFER CARRYING APPARATUS

Kakehi Yutaka; Nawata Makoto; Nakazato Norio; Nakatsui Fujitsugu


Archive | 1996

PLASMA TREATMENT APPARATUS AND CONTROL METHOD

Takahashi Nushito; Nawata Makoto; Usui Taketo; Kanai Saburo; Kaji Tetsunori


Archive | 1987

MICROWAVE PLASMA PROCESSOR

Kawahara Hironori; Kawasaki Yoshinao; Nawata Makoto


Archive | 1986

PLASMA PROCESSING AND PROCESSOR THEREOF

Nakazato Norio; Nawata Makoto; Izumi Hideki


Archive | 2000

PLASMA CLEANING METHOD FOR MICROWAVE PLASMA ETCHING APPARATUS

Nawata Makoto; Tamura Satoyuki; Yakushiji Mamoru


Archive | 1996

PLASMA PROCESSING DEVICE AND CONTROL THEREOF

Takahashi Nushito; Nawata Makoto


Archive | 1989

REDUCED PRESSURE TREATMENT DEVICE

Nakazato Norio; Nakatsui Fujitsugu; Watanabe Seiichi; Ito Yoichi; Fukuyama Ryoji; Nawata Makoto; Muramatsu Kimio; Kawasaki Yoshinao


Archive | 1982

GAS-LIQUID CONTACT TOWER

Nakazato Norio; Yoshimatsu Yukiyoshi; Nawata Makoto; Itou Youichi; Masuda Sadao


Archive | 2000

METHOD AND DEVICE FOR PLASMA PROCESS

Kaji Tetsunori; Hamazaki Ryoji; Ono Tetsuo; Nawata Makoto

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