Axel Scholz | Researchain

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Featured researches published by Axel Scholz.

Archive | 2005

Illumination system for a wavelength of less than or equal to 193 nm, with sensors for determining an illumination

Wolfgang Singer; Martin Antoni; Johannes Wangler; Markus Weiss; Vadim Yevgenyevich Banine; Marcel Dierichs; Roel Moors; Karl Heinz Schuster; Axel Scholz; Philipp Bosselmann; Bernd Warm

Archive | 2007

Illumination system and polarizer for a microlithographic projection exposure apparatus

Damian Fiolka; Axel Scholz; Manfred Maul

Archive | 2008

EUV illumination system with a system for measuring fluctuations of the light source

Axel Scholz; Markus Weiss; Manfred Maul; Philipp Bosselmann

Archive | 2008

Optical integrator for an illumination system of a microlithographic projection exposure apparatus

Oliver Wolf; Heiko Siekmann; Eva Kalchbrenner; Siegfried Rennon; Johannes Wangler; Andre Bresan; Michael Gerhard; Nils Haverkamp; Axel Scholz; Ralf Scharnweber; Michael Layh; Stefan Burkart

Archive | 2005

Illumination system for a wavelength of ≦ 193 nm, with sensors for determining an illumination

Wolfgang Singer; Martin Antoni; Johannes Wangler; Markus Weiss; Vadim Yevgenyevich Banine; Marcel Dierichs; Roel Moors; Karl Heinz Schuster; Axel Scholz; Philipp Bosselmann; Bernd Warm

Archive | 2005