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Karsten Urban

Leica Microsystems

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Publication

Featured researches published by Karsten Urban.

Archive | 2004

System operating unit

Roland Hedrich; Karsten Urban; Joachim Wienecke

Archive | 2002

Holding device for wafers

Karsten Urban; Winfried Deutscher; Joachim Wienecke

Archive | 2001

Substrate conveying module and system made up of substrate conveying module and workstation

Andreas Birkner; Knut Hiltawski; Karsten Urban; Joachim Wienecke

Archive | 2000

Semiconductor substrate conveying module in semiconductor manufacture, has mechanical connecting elements in side walls which coact with corresponding connecting element of workstation

Andras Birkner; Knut Hiltawski; Karsten Urban; Joachim Wienecke

Archive | 2002

Arrangement for wafer inspection

Kersten Schaefer; Karsten Urban; Frank Bernhardt; Joachim Wienecke

Archive | 2001

Wafer inspection apparatus for semiconductor manufacture, generates correction signal based on deviation of rotation angle from reference angle

Kersten Schaefer; Karsten Urban; Frank Bernhardt; Joachim Wienecke

Archive | 2002

Arrangement for the visual inspection of substrates

Karsten Urban

Archive | 2004

Height adjustable examination table for semiconductor wafers, has flexible supports bent by lateral actuator to raise table surface

Karsten Urban; Joachim Wienecke

Archive | 2003

System Control Unit

Roland Hedrich; Karsten Urban; Joachim Wienecke

Archive | 2003

Systemgehäuse System Cabinets

Roland Hedrich; Karsten Urban; Joachim Wienecke

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Collaboration

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Joachim Wienecke

Leica Microsystems

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Knut Hiltawski

Leica Microsystems

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Andreas Birkner

Leica Microsystems

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Roland Hedrich

Leica Microsystems

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Frank Bernhardt

Leica Microsystems

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Kersten Schaefer

Leica Microsystems

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Andras Birkner

Leica Microsystems

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