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Dive into the research topics where Knut Hiltawski is active.

Publication


Featured researches published by Knut Hiltawski.


Archive | 2001

Substrate conveying module and system made up of substrate conveying module and workstation

Andreas Birkner; Knut Hiltawski; Karsten Urban; Joachim Wienecke


Archive | 2003

Method and arrangement for transporting and inspecting semiconductor substrates

Andreas Birkner; Frank Bernhardt; Knut Hiltawski


Archive | 2000

Semiconductor substrate conveying module in semiconductor manufacture, has mechanical connecting elements in side walls which coact with corresponding connecting element of workstation

Andras Birkner; Knut Hiltawski; Karsten Urban; Joachim Wienecke


Archive | 2001

Inserting carriage for a measuring and/or analytical device

Knut Hiltawski


Archive | 2004

Disk-shaped substrate testing system, has suction unit arranged at side of housing and spaced from mounting plate, and opening provided in suction unit, where opening has width that corresponds to distance of plate to wall of housing

Knut Hiltawski; René Schenck


Archive | 2002

Arrangement and method for the identification of substrates

Dominik Grau; Andreas Birkner; Knut Hiltawski; Frank Bernhardt


Archive | 2001

Identification of a substrate, particularly a semiconductor wafer marked with identifying characters by use of illumination device and reader device with pre-alignment controlled by a controller and light intensity sensor

Dominik Grau; Andreas Birkner; Knut Hiltawski; Frank Bernhardt


Archive | 2005

System for inspecting a disk-shaped object

Knut Hiltawski; Magdalena I. Hiltawski; Frank A. Hiltawski


Archive | 2000

Substrate supply module and system of substrate supply module and workstation

Andreas Birkner; Knut Hiltawski; Karsten Urban; Joachim Wienecke


Archive | 2000

Substrat-Zuführungsmodul und System aus Substrat-Zuführungsmodul und Arbeitsstation Substrate supply module and system of substrate supply module and Workstation

Andreas Birkner; Knut Hiltawski; Karsten Urban; Joachim Wienecke

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