Katsuya Ebara
Hitachi
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Publication
Featured researches published by Katsuya Ebara.
Separation Science and Technology | 1990
Hideaki Kurokawa; Osamu Kuroda; Sankichi Takahashi; Katsuya Ebara
Abstract To study the permeate characteristics of membrane distillation considering heat and mass transfers and concentration polarization, theoretical and experimental studies were performed. To understand the effect of concentration polarization, concentrated solutions of LiBr and H2SO4 were used as feed. The permeate flux was found to be proportional to the vapor pressure difference between the feed and cooled surface and decreased with increasing concentration because of the concentration and temperature polarization. Furthermore, when considering the heat and mass transfers and concentration polarization, the permeate flux could be estimated accurately.
Kagaku Kogaku Ronbunshu | 1992
Yasuo Koseki; Hideaki Kurokawa; Katsuya Ebara; Hitoshi Sato; Toshihiko Kaneko; Sankichi Takahashi
半導体ウエハの洗浄工程で大量に用いられる高純度超純水の製造装置の性能を評価するため.集積度16Mbit対応超純水の水質を従来指標と新指標である全蒸発残留不純物量 (Ts : Total Solid) で, オンライン計測した.実験に供試した超純水の水質は従来指標では16Mbit対応超純水の目標値を十分満足しているものの.TS値が高いため.さらに装置の高性能化が必要なことが明確になった.水中の主不純物であるTOC (Total Organic Carbon) 値とTS値を用いて、超純水製造プロセス系の要素機器の処理性能を評価した結果, UV酸化, イオン交換, 限外濾過の各プロセスからの不純物の溶出があり, 超純水は原水とは異なり溶出成分 (57%) や難酸化性成分 (50%) が多いと推測された.
Archive | 1988
Hideaki Kurokawa; Katsuya Ebara; Sankichi Takahashi; Harumi Matsuzaki; Hiroaki Yoda; Takahisa Nitta; Isao kouchi; Yukio Hishinuma
Archive | 1990
Kenji Mitani; Akira Ashida; Katsuya Ebara; Hideaki Kurokawa
Archive | 1988
Hideaki Kurokawa; Akira Yamada; Yasuo Koseki; Harumi Matsuzaki; Katsuya Ebara; Sankichi Takahashi; Hiroaki Yoda; Nobuatsu Hayashi; Isao Okouchi; Yukio Hishinuma; Naohiro Momma
Archive | 1988
Seiji Takeuchi; Katsuya Ebara; Tomoichi Kamo; Kazuo Iwamoto; Tatsuo Horiba; Teruo Kumagai; Kouki Tamura; Kunko Kitami
Archive | 1985
Harumi Matsuzaki; Masayoshi Kubota; Katsuya Ebara; Sankichi Takahashi; Minoru Kuroiwa
Archive | 1978
Toshio Ogawa; Katsuya Ebara; Sankichi Takahashi
Archive | 1985
Yasuo Koseki; Sankichi Takahashi; Katsuya Ebara; Osamu Kuroda; Hideaki Kurokawa
Archive | 1986
Katsuya Ebara; Yasuo Koseki; Hideaki Kurokawa; Sankichi Takahashi; Akira Yamada