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Naonori Akae

Hitachi

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Publication

Featured researches published by Naonori Akae.

Archive | 2010

Manufacturing method of semiconductor substrate and substrate processing apparatus

Naonori Akae; Yoshiro Hirose; Tomohide Kato

Archive | 2011

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE, METHOD OF CLEANING A PROCESS VESSEL, AND SUBSTRATE PROCESSING APPARATUS

Naonori Akae; Yoshiro Hirose; Kotaro Murakami

Archive | 2012

Method of manufacturing semiconductor device, method of processing substrate and non-transitory computer readable recording medium

Kazuhiro Yuasa; Naonori Akae; Masato Terasaki

Archive | 2013

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM

Kazuhiro Yuasa; Naonori Akae

Archive | 2012

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER READABLE RECORDING MEDIUM

Yosuke Ota; Naonori Akae; Yoshiro Hirose; Ryota Sasajima

Archive | 2009

Method of forming an insulation film having low impurity concentrations

Naonori Akae; Yoshiro Hirose; Yushin Takasawa; Yosuke Ota

Archive | 2014

CLEANING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM

Masato Terasaki; Naonori Akae; Hideki Horita

Archive | 2012

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATAUS

Naonori Akae; Yoshiro Hirose; Yushin Takasawa; Yosuke Ota

Archive | 2009

Method of producing semiconductor device, and substrate processing apparatus

Naonori Akae; Yushin Takasawa

Archive | 2017

A gas supply nozzle, a substrate processing apparatus, and a method of manufacturing the semiconductor device

Ryota Sasajima; Naonori Akae; Risa Yamakoshi; Kosuke Takagi; Masayoshi Minami; Shintaro Kogura; Toshiki Fujino; Masato Terasaki

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Collaboration

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Masato Terasaki

Hitachi

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Yoshiro Hirose

Hitachi

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Ryota Sasajima

Hitachi

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Yosuke Ota

Hitachi

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Yushin Takasawa

Hitachi

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Hideki Horita

Hitachi

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Kazuhiro Yuasa

Hitachi

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Kosuke Takagi

Hitachi

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Masayoshi Minami

Hitachi

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Risa Yamakoshi

Hitachi

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