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Kazuhito Uchikura

Toshiba

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Publication

Featured researches published by Kazuhito Uchikura.

Archive | 2001

Aqueous dispersion for chemical mechanical polishing and chemical mechanical polishing process

Kazuhito Uchikura; Masayuki Motonari; Masayuki Hattori; Nobuo Kawahashi

Archive | 2009

Aqueous dispersion for chemical mechanical polishing and chemical mechanical polishing method

Hirotaka Shida; Takafumi Shimizu; Masatoshi Ikeda; Shou Kubouchi; Yousuke Shibata; Kazuhito Uchikura; Akihiro Takemura

Archive | 2006

Chemical mechanical polishing aqueous dispersion, chemical mechanical polishing method, and kit for preparing chemical mechanical polishing aqueous dispersion

Kazuhito Uchikura; Tomohisa Konno; Nobuo Kawahashi; Masayuki Hattori

Archive | 2007

Cleaning composition, cleaning method, and manufacturing method of semiconductor device

Michiaki Andou; Tomohisa Konno; Hirotaka Shida; Kazuhito Uchikura; Nobuyuki Kurashima; Gaku Minamihaba; Yoshikuni Tateyama; Hiroyuki Yano

Archive | 2007

AQUEOUS DISPERSION FOR CHEMICAL MECHANICAL POLISHING, CHEMICAL MECHANICAL POLISHING METHOD, KIT FOR CHEMICAL MECHANICAL POLISHING, AND KIT FOR PREPARING AQUEOUS DISPERSION FOR CHEMICAL MECHANICAL POLISHING

Kazuhito Uchikura; Hirotaka Shida; Yuuichi Hashiguchi; Gaku Minamihaba; Dai Fukushima; Yoshikuni Tateyama; Hiroyuki Yano

Archive | 2008

CHEMICAL MECHANICAL POLISHING AQUEOUS DISPERSION PREPARATION SET, METHOD OF PREPARING CHEMICAL MECHANICAL POLISHING AQUEOUS DISPERSION, CHEMICAL MECHANICAL POLISHING AQUEOUS DISPERSION, AND CHEMICAL MECHANICAL POLISHING METHOD

Eiichirou Kunitani; Hirotaka Shida; Kazuhito Uchikura

Archive | 2008

Reagent kit for preparing chemical mechanical polishing aqueous dispersion, and use thereof

Eiichirou Kunitani; Hirotaka Shida; Kazuhito Uchikura

Archive | 2009

Dispersion aqueuse pour polissage mécano-chimique et procédé de polissage mécano-chimique

Hirotaka Shida; 裕貴 仕田; Takafumi Shimizu; 崇文 清水; Masatoshi Ikeda; 池田 正俊; Shou Kubouchi; 翔 窪内; Yousuke Shibata; 陽介 柴田; Michiaki Andou; 民智明 安藤; Kazuhito Uchikura; 和一 内倉; Akihiro Takemura; 彰浩 竹村

Archive | 2008

Zubereitung für eine wässrige Dispersion zum chemisch-mechanischen Polieren, Verfahren zur Herstellung einer wässrigen Dispersion zum chemisch-mechanischen Polieren, wässrige Dispersion zum chemisch-mechanischen Polieren und Verfahren zum chemisch-mechanischen Polieren

Eiichirou Kunitani; Hirotaka Shida; Kazuhito Uchikura

Archive | 2007

Wässrige dispersion zum chemisch-mechanischen polieren, verfahren zum chemisch-mechanischen polieren, kit zum chemisch-mechanischen polieren und kit zum herstellen einer wässrigen dispersion zum chemisch-mechanischen polieren

Dai Fukushima; Yuuichi Hashiguchi; Gaku Minamihaba; Hirotaka Shida; Yoshikuni Tateyama; Kazuhito Uchikura; Hiroyuki Yano

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Hirotaka Shida

Toshiba

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Masayuki Hattori

Toshiba

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Nobuo Kawahashi

Toshiba

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Gaku Minamihaba

Toshiba

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Hiroyuki Yano

Toshiba

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Tomohisa Konno

Toshiba

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Yoshikuni Tateyama

Toshiba

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Michiaki Andou

Toshiba

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Akihiro Takemura

Toshiba

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Dai Fukushima

Toshiba

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