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Kazuto Ando

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Publication

Featured researches published by Kazuto Ando.

Archive | 2010

Electrostatic chuck, production method of electrostatic chuck and electrostatic chuck device

Hironori Kugimoto; Kazuto Ando; Yoshiaki Moriya

Archive | 1997

Base board having transparent conductive film and its manufacture

Kazuto Ando; Noboru Kinoshita; 和人 安藤; 暢 木下

Archive | 2010

Electrostatic chuck, production method thereof and electrostatic chuck device

Kazuto Ando; Hirokuni Kugimoto; Yoshiaki Moriya; 和人 安藤; 義明 森谷; 弘訓 釘本

Archive | 2009

Rare-erath-element boride member and process for producing the same

Tadahiro Ohmi; 大見 忠弘; Tetsuya Goto; 後藤 哲也; Mikio Konishi; 小西 幹郎; Kazuto Ando; 和人 安藤

Archive | 1999

Abrasive for high-speed mirror surface polishing

Kazuto Ando; Noboru Kinoshita; Yoshitaka Yamamoto; 和人 安藤; 良貴 山本; 暢 木下

Archive | 2011

Electrostatic chuck and method for manufacturing the same

Kazuto Ando; Hirokuni Kugimoto; 和人 安藤; 弘訓 釘本

Archive | 2009

METHOD FOR MANUFACTURING METAL BORIDE SINTERED COMPACT, LANTHANUM BORIDE SINTERED COMPACT, AND TARGET USING THE LANTHANUM BORIDE SINTERED COMPACT

Kazuto Ando; Kentaro Takahashi; 和人 安藤; 健太郎 高橋

Archive | 2009

Lanthanum boride sintered compact, target using sintered compact and method for producing sintered compact

Kazuto Ando; Kentaro Takahashi; 和人 安藤; 健太郎 高橋

Archive | 2012

ELECTROSTATIC CHUCK MEMBER

Hironori Kugimoto; Kazuto Ando

Archive | 2010

High-frequency transmission material

Kazuto Ando; Shintaro Hayashi; Masayuki Ishizuka; Hirokuni Kugimoto; 和人 安藤; 慎太郎 林; 雅之 石塚; 弘訓 釘本

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Collaboration

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Kentaro Takahashi

Chiba University

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Tadahiro Ohmi

Mitsubishi Electric

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Tetsuya Goto

Tohoku University

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Masayuki Ishizuka

Tohoku University

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