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Tetsuya Goto

Tokyo Electron

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Publication

Featured researches published by Tetsuya Goto.

Archive | 2008

Magnetron sputtering apparatus

Tadahiro Ohmi; Tetsuya Goto; Takaaki Matsuoka

Archive | 2002

Microwave plasma processing device, plasma processing method, and microwave radiating member

Tadahiro Ohmi; Masaki Hirayama; Tetsuya Goto

Archive | 2007

Shower plate and manufacturing method thereof, and plasma processing apparatus, plasma processing method and electronic device manufacturing method using the shower plate

Masahiro Okesaku; Tetsuya Goto; Tadahiro Ohmi; Kiyotaka Ishibashi

Archive | 2008

TOP PLATE AND PLASMA PROCESS APPARATUS EMPLOYING THE SAME

Kiyotaka Ishibashi; Tadahiro Ohmi; Tetsuya Goto; Masahiro Okesaku

Archive | 2007

SHOWER PLATE, METHOD FOR MANUFACTURING THE SHOWER PLATE, PLASMA PROCESSING APPARATUS USING THE SHOWER PLATE, PLASMA PROCESSING METHOD AND ELECTRONIC DEVICE MANUFACTURING METHOD

Masahiro Okesaku; Tetsuya Goto; Tadahiro Ohmi; Kiyotaka Ishibashi

Archive | 2007

SHOWER PLATE, AND PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND ELECTRONIC DEVICE MANUFACTURING METHOD USING THE SHOWER PLATE

Masahiro Okesaku; Tetsuya Goto; Tadahiro Ohmi; Kiyotaka Ishibashi

Archive | 2002

Microwave plasma processing apparatus, microwave processing method and microwave feeding apparatus

Naohisa Goto; Tadahiro Ohmi; Masaki Hirayama; Tetsuya Goto

Archive | 2007

ION IMPLANTING APPARATUS AND ION IMPLANTING METHOD

Tadahiro Ohmi; Tetsuya Goto; Akinobu Teramoto; Takaaki Matsuoka

Archive | 2007

Shower plate sintered integrally with gas release hole member and method for manufacturing the same

Masahiro Okesaku; Tadahiro Ohmi; Tetsuya Goto; Takaaki Matsuoka; Toshihisa Nozawa; Atsutoshi Inokuchi; Kiyotaka Ishibashi

Archive | 2008

APPARATUS AND METHOD FOR MANUFACTURING PHOTOELECTRIC CONVERSION ELEMENTS, AND PHOTOELECTRIC CONVERSION ELEMENT

Tadahiro Ohmi; Akinobu Teramoto; Tetsuya Goto; Kouji Tanaka

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Collaboration

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Tadahiro Ohmi

Tohoku University

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Takaaki Matsuoka

Toyota

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Kiyotaka Ishibashi

Tokyo Electron

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Masaki Hirayama

Tokyo Electron

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Masahiro Okesaku

Tokyo Electron

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Shigetoshi Sugawa

Tokyo Electron

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Akinobu Teramoto

Tokyo Electron

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Kazuhiro Yoshikawa

Tokyo Electron

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Kouji Tanaka

Tokyo Electron

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Naohisa Goto

Tokyo Electron

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