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Kedarnath Sangam

Applied Materials

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Publication

Featured researches published by Kedarnath Sangam.

Archive | 2007

Control of gas flow and delivery to suppress the formation of particles in an MOCVD/ALD system

Son T. Nguyen; Kedarnath Sangam; Miriam Schwartz; Kenric Choi; Sanjay Bhat; Pravin K. Narwankar; Shreyas Kher; Rahul Sharangapani; Shankar Muthukrishnan; Paul Deaton

Archive | 2008

Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber

Blake Koelmel; Alexander N. Lerner; Joseph M. Ranish; Kedarnath Sangam; Khurshed Sorabji

Archive | 2008

Thermal reactor with improved gas flow distribution

Ming-Kuei (Michael) Tseng; Norman L. Tam; Yoshitaka Yokota; Agus Tjandra; Robert Navasca; Mehran Behdjat; Sundar Ramamurthy; Kedarnath Sangam; Alexander N. Lerner

Archive | 2009

Rapid thermal processing lamphead with improved cooling

Joseph M. Ranish; Khurshed Sorabji; Kedarnath Sangam; Alexander N. Lerner

Archive | 2012

Process gas delivery for semiconductor process chamber

Kedarnath Sangam; Anh N. Nguyen

Archive | 2009

Slit valve having increased flow uniformity

Chandrasekhar Balasubramanyam; Helder Lee; Miriam Schwartz; Elizabeth Wu; Kedarnath Sangam

Archive | 2015

COOLING-IMPROVED RAPID THERMAL PROCESSING LAMP HEAD

Joseph M. Ranish; Khurshed Sorabji; Kedarnath Sangam; Alexander N. Lerner

Archive | 2010

GAS DELIVERY SYSTEM HAVING REDUCED PRESSURE VARIATION

Kedarnath Sangam

Archive | 2010

AMPOULE AND DELIVERY SYSTEM FOR SOLID PRECURSORS

Kedarnath Sangam

Archive | 2009

Voûte à lampes pour traitement thermique rapide avec refroidissement amélioré

Joseph M. Ranish; Khurshed Sorabji; Kedarnath Sangam; Alexander N. Lerner

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Alexander N. Lerner

Applied Materials

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Joseph M. Ranish

Applied Materials

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Khurshed Sorabji

Applied Materials

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Blake Koelmel

Applied Materials

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Miriam Schwartz

Applied Materials

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Agus Tjandra

Applied Materials

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Anh N. Nguyen

Applied Materials

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Chandrasekhar Balasubramanyam

Applied Materials

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Elizabeth Wu

Applied Materials

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Helder Lee

Applied Materials

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