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Keiichi Masunaga

Shin-Etsu Chemical

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Publication

Featured researches published by Keiichi Masunaga.

Archive | 2011

Chemically amplified negative resist composition and patterning process

Takanobu Takeda; Tamotsu Watanabe; Ryuji Koitabashi; Keiichi Masunaga; Akinobu Tanaka; Osamu Watanabe

Archive | 2006

Negative resist composition and patterning process

Daisuke Domon; Keiichi Masunaga; Akinobu Tanaka; Satoshi Watanabe

Archive | 2011

CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION FOR EB OR EUV LITHOGRAPHY AND PATTERNING PROCESS

Keiichi Masunaga; Satoshi Watanabe; Akinobu Tanaka; Daisuke Domon

Archive | 2006

POLYMERIC COMPOUND, RESIST MATERIAL, AND METHOD OF PATTERN FORMATION USING THE RESIST MATERIAL

Ryuji Koitabashi; Keiichi Masunaga; Takanobu Takeda; Osamu Watanabe; Satoshi Watanabe; Tamotsu Watanabe; 恵一 増永; 龍二 小板橋; 隆信 武田; 保 渡辺; 聡 渡邉; 渡邊 修

Archive | 2013

Chemically amplified negative resist composition and pattern forming process

Keiichi Masunaga; Satoshi Watanabe; Yoshio Kawai; Luisa Dominica Bozano; Ratnam Sooriyakumaran

Archive | 2007

Photomask blank, resist pattern forming method, and photomask manufacturing method

Ryuji Koitabashi; Keiichi Masunaga; Takanobu Takeda; Satoshi Watanabe; Tamotsu Watanabe; 恵一 増永; 龍二 小板橋; 隆信 武田; 保 渡辺; 聡 渡邉

Archive | 2011

Novel sulfonium salt, polymer, method for producing the polymer, resist composition and patterning process

Masaki Ohashi; Satoshi Watanabe; Youichi Ohsawa; Keiichi Masunaga; Takeshi Kinsho

Archive | 2008

PHOTOMASK BLANK, RESIST PATTERN FORMING PROCESS, AND PHOTOMASK PREPARATION PROCESS

Ryuji Koitabashi; Satoshi Watanabe; Takanobu Takeda; Keiichi Masunaga; Tamotsu Watanabe

Archive | 2007

Novel polymer, resist composition and patterning process using the same

Takanobu Takeda; Osamu Watanabe; Satoshi Watanabe; Ryuji Koitabashi; Keiichi Masunaga; Tamotsu Watanabe

Archive | 2010

Chemically amplified positive photoresist composition and pattern forming process

Keiichi Masunaga; Akinobu Tanaka; Daisuke Domon; Satoshi Watanabe; Youichi Ohsawa; Masaki Ohashi

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Collaboration

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Satoshi Watanabe

Shin-Etsu Chemical

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Daisuke Domon

Shin-Etsu Chemical

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Akinobu Tanaka

Shin-Etsu Chemical

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Ryuji Koitabashi

Shin-Etsu Chemical

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Takanobu Takeda

Shin-Etsu Chemical

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Tamotsu Watanabe

Shin-Etsu Chemical

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Osamu Watanabe

Shin-Etsu Chemical

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Masaki Ohashi

Shin-Etsu Chemical

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Yoichi Osawa

Shin-Etsu Chemical

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Jun Hatakeyama

Shin-Etsu Chemical

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