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Daisuke Domon

Shin-Etsu Chemical

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Publication

Featured researches published by Daisuke Domon.

Archive | 2006

Negative resist composition and patterning process

Daisuke Domon; Keiichi Masunaga; Akinobu Tanaka; Satoshi Watanabe

Archive | 2011

CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION FOR EB OR EUV LITHOGRAPHY AND PATTERNING PROCESS

Keiichi Masunaga; Satoshi Watanabe; Akinobu Tanaka; Daisuke Domon

Archive | 2010

Chemically amplified positive photoresist composition and pattern forming process

Keiichi Masunaga; Akinobu Tanaka; Daisuke Domon; Satoshi Watanabe; Youichi Ohsawa; Masaki Ohashi

Archive | 2010

CHEMICALLY AMPLIFIED RESIST COMPOSITION AND PATTERN FORMING PROCESS

Keiichi Masunaga; Satoshi Watanabe; Akinobu Tanaka; Daisuke Domon

Archive | 2010

Negative resist composition and patterning process using the same

Akinobu Tanaka; Keiichi Masunaga; Daisuke Domon; Satoshi Watanabe

Archive | 2009

POSITIVE RESIST COMPOSITION AND PATTERING PROCESS

Katsuya Takemura; Keiichi Masunaga; Daisuke Domon; Masayoshi Sagehashi

Archive | 2012

SULFONIUM SALT, POLYMER, CHEMICALLY AMPLIFIED RESIST COMPOSITION USING SAID POLYMER, AND RESIST PATTERNING PROCESS

Daisuke Domon; Keiichi Masunaga; Satoshi Watanabe

Archive | 2010

NEGATIVE RESIST MATERIAL, PATTERN FORMATION METHOD AND PHOTOMASK BLANK

Daisuke Domon; Jun Hatakeyama; Keiichi Masunaga; Satoshi Watanabe; 大将 土門; 恵一 増永; 聡 渡邉; 畠山 潤

Archive | 2010

POSITIVE RESIST COMPOSITION AND PATTERN FORMING PROCESS

Akinobu Tanaka; Keiichi Masunaga; Daisuke Domon; Satoshi Watanabe

Archive | 2016

Negative resist composition and pattern forming process

Daisuke Domon; Keiichi Masunaga; Satoshi Watanabe

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Collaboration

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Keiichi Masunaga

Shin-Etsu Chemical

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Satoshi Watanabe

Shin-Etsu Chemical

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Akinobu Tanaka

Shin-Etsu Chemical

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Jun Hatakeyama

Shin-Etsu Chemical

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Koji Hasegawa

Shin-Etsu Chemical

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Masaaki Kotake

Shin-Etsu Chemical

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Masahiro Fukushima

Shin-Etsu Chemical

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Takeru Watanabe

Shin-Etsu Chemical

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聡 渡邉

Kyushu University

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Daniel P. Sanders

Shin-Etsu Chemical

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