Keiko Yano

Synthesis and applications of sulfonated polyaniline

We present new synthesis and applications of fully-sulfonated polyaniline(SPAN), a self-doped conducting polymer. It is difficult to make polymers of aniline sulfonic acids(ASA) with a high molecular weight, since reactivity of ASA as a monomer is low due to the presence of an electron attractive sulfonic group. We prepared a high molecular weight poly(aniline sulfonic acid)(PAS) with a high yield by polymerizing the ASA having an electron donative group under basic conditions. The conducting polymer materials based on this polymer were developed for a variety of applications including; Over Coated Film for Resists (aquaSAVE®) — Charge prevention for e-beam lithography and improvement of post-exposure delay(PED) latitude for Chemical amplified resists. Conductive Bottom Layers of Multi level Resists — Reduction of gate oxide damage in metal etching, etc.