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Kenichi Nishizawa

Tokyo Electron

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Publication

Featured researches published by Kenichi Nishizawa.

Archive | 2005

Manufacturing method of semiconductor device and film deposition system

Yasuo Kobayashi; Kenichi Nishizawa; Takatoshi Kameshima; Takaaki Matsuoka

Archive | 2005

Method for manufacturing semiconductor device and film-forming system

Yasuo Kobayashi; Kenichi Nishizawa; Takatoshi Kameshima; Takaaki Matsuoka

Archive | 2005

Transportation apparatus and tomography system

Shinichi Iisaku; Shigeru Chikamatsu; Kenichi Nishizawa; Naoki Nakamura; Akira Izuhara; Katsumi Azu; Masashi Maida; Junko Sekiguchi

Archive | 2004

Method for forming film, method for manufacturing semiconductor device, semiconductor device and substrate treatment system

Kohei Kawamura; Yasuo Kobayashi; Kenichi Nishizawa; Yasuhiro Terai; Akira Asano

Archive | 2010

FLUORINE DOPED CARBON FILMS PRODUCED BY MODIFICATION BY RADICALS

Kenichi Nishizawa; Yasuhiro Terai; Akira Asano

Archive | 2004

Plasma film-forming method and plasma film-forming apparatus

Yasuo Kobayashi; Kohei Kawamura; Akira Asano; Yasuhiro Terai; Kenichi Nishizawa

Archive | 2006

Plasma-Assisted Deposition Method and System for Carrying Out the Same

Yasuo Kobayashi; Kenichi Nishizawa; Takatoshi Kameshima; Ryuichiro Isaki; Manabu Shinriki

Archive | 2004

METHOD AND DEVICE FOR PLASMA DEPOSITION

Akira Asano; Gohei Kawamura; Yasuo Kobayashi; Kenichi Nishizawa; Yasuhiro Terai; 康浩 寺井; 保男 小林; 剛平 川村; 明 浅野; 賢一 西澤

Archive | 2005

Plasma film-forming method and apparatus therefor

Yasuo Kobayashi; Kenichi Nishizawa; Takatoshi Kameshima; Ryuichiro Isaki; Manabu Shinriki

Archive | 2002

METHOD AND DEVICE FOR TREATMENT

Yasuo Kobayashi; Kenichi Nishizawa; Masao Yoshioka

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Collaboration

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Yasuo Kobayashi

Toyo University

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Akira Asano

Tokyo Electron

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Yasuhiro Terai

Tokyo Electron

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Naoki Nakamura

Okayama University

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Kohei Kawamura

Hiroshima University

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Takatoshi Kameshima

Tokyo Electron

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Manabu Shinriki

Tokyo Electron

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Ryuichiro Isaki

Tokyo Electron

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Takaaki Matsuoka

Tokyo Electron

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Kotaro Miyatani

Tokyo Electron

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