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Takaaki Matsuoka

Tokyo Electron

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Publication

Featured researches published by Takaaki Matsuoka.

Archive | 2003

Substrate processing device

Takaaki Matsuoka; Katsuhiko Iwabuchi; Shigeru Ishizawa; Tsutomu Hiroki

Archive | 2008

Magnetron sputtering apparatus

Tadahiro Ohmi; Tetsuya Goto; Takaaki Matsuoka

Archive | 2005

Method and device for heat treatment

Takaaki Matsuoka

Archive | 2005

Manufacturing method of semiconductor device and film deposition system

Yasuo Kobayashi; Kenichi Nishizawa; Takatoshi Kameshima; Takaaki Matsuoka

Archive | 2003

Plasma processing equipment and plasma processing method

Takaaki Matsuoka; Satoru Kawakami; Katsuhiko Iwabuchi

Archive | 2000

Drive mechanism having a gas bearing operable under a negative pressure environment

Takaaki Matsuoka; Teruo Asakawa

Archive | 2006

Film Forming Apparatus, Evaporating Jig, and Measurement Method

Tadahiro Ohmi; Takaaki Matsuoka; Shozo Nakayama; Hironori Ito

Archive | 2007

ION IMPLANTING APPARATUS AND ION IMPLANTING METHOD

Tadahiro Ohmi; Tetsuya Goto; Akinobu Teramoto; Takaaki Matsuoka

Archive | 2007

Shower plate sintered integrally with gas release hole member and method for manufacturing the same

Masahiro Okesaku; Tadahiro Ohmi; Tetsuya Goto; Takaaki Matsuoka; Toshihisa Nozawa; Atsutoshi Inokuchi; Kiyotaka Ishibashi

Archive | 2008

PLASMA PROCESSING SYSTEM AND PLASMA PROCESSING METHOD

Tadahiro Ohmi; Takaaki Matsuoka

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Collaboration

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Tadahiro Ohmi

Tohoku University

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Tetsuya Goto

Tokyo Electron

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Toshihisa Nozawa

Tokyo Electron

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Atsutoshi Inokuchi

Tokyo Electron

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Kohei Kawamura

Tokyo Electron

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Hiraku Ishikawa

Tohoku University

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Katsuhiko Iwabuchi

Tokyo Electron

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Akinobu Teramoto

Tohoku University

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Kohei Watanuki

Tokyo Electron

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Masahiro Horigome

Tokyo Electron

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