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Kevin Peterlinz

KLA-Tencor

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Publication

Featured researches published by Kevin Peterlinz.

Archive | 2012

Dynamically Adjustable Semiconductor Metrology System

David Y. Wang; Guorong Vera Zhuang; Johannes D. De Veer; Kevin Peterlinz; Shankar Krishnan

Archive | 2014

METHOD OF ELECTROMAGNETIC MODELING OF FINITE STRUCTURES AND FINITE ILLUMINATION FOR METROLOGY AND INSPECTION

Alexander Kuznetsov; Kevin Peterlinz; Andrei V. Shchegrov; Leonid Poslavsky; Xuefeng Liu

Archive | 2013

Combined x-ray and optical metrology

Kevin Peterlinz; Andrei V. Shchegrov; Michael S. Bakeman; Thaddeus Gerard Dziura

Archive | 2012

Optical metrology tool equipped with modulated illumination sources

Andrei V. Shchegrov; Lawrence D. Rotter; David Y. Wang; Andrei Veldman; Kevin Peterlinz; Gregory Brady; Derrick Shaughnessy

Archive | 2014

Measurement Of Multiple Patterning Parameters

Andrei V. Shchegrov; Shankar Krishnan; Kevin Peterlinz; Thaddeus Gerard Dziura; Noam Sapiens; Stilian Ivanov Pandev

Archive | 2013

Apparatus And Method Of Measuring Roughness And Other Parameters Of A Structure

Andrei V. Shchegrov; Gregory Brady; Kevin Peterlinz

Archive | 2014

Metrology Tool With Combined XRF And SAXS Capabilities

Michael S. Bakeman; Andrei V. Shchegrov; Kevin Peterlinz; Thaddeus Gerard Dziura

Archive | 2017

Spectroscopic beam profile overlay metrology

Jiyou Fu; Noam Sapiens; Kevin Peterlinz; Stilian Ivanov Pandev

Archive | 2018

Spectral Reflectometry For In-Situ Process Monitoring And Control

Prateek Jain; Daniel Wack; Kevin Peterlinz; Andrei V. Shchegrov; Shankar Krishnan

Archive | 2018

RÉFLECTOMÉTRIE SPECTRALE POUR SURVEILLANCE ET RÉGULATION IN SITU DE PROCESSUS

Prateek Jain; Daniel Wack; Kevin Peterlinz; Andrei V. Shchegrov; Shankar Krishnan

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Collaboration

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Andrei V. Shchegrov

KLA-Tencor

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Shankar Krishnan

KLA-Tencor

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Noam Sapiens

KLA-Tencor

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Thaddeus Gerard Dziura

KLA-Tencor

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Alexander Kuznetsov

KLA-Tencor

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Damon F. Kvamme

KLA-Tencor

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Daniel R. Hennigan

KLA-Tencor

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Daniel Wack

KLA-Tencor

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David Y. Wang

KLA-Tencor

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Esen Salcin

KLA-Tencor

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