Thomas A. Figura

Material removal method for forming a structure

Peripheral gate stacks and recessed array gates

Process for fabricating a cup-shaped DRAM capacitor using a multi-layer partly-sacrificial stack

Method of forming contact areas between vertical conductors

Process for manufacturing a DRAM capacitor having an annularly-grooved, cup-shaped storage-node plate which stores charge on inner and outer surfaces

Method for increasing capacitance of an HSG rugged capacitor using a phosphine rich oxidation and subsequent wet etch

Thermal trench isolation

Method and apparatus for forming features in holes, trenches and other voids in the manufacturing of microelectronic devices

Integrated capacitor bottom electrode with etch stop layer

Method of semiconductor device isolation employing polysilicon layer for field oxide formation