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Kohei Fukushima

Tokyo Electron

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Publication

Featured researches published by Kohei Fukushima.

Archive | 2006

Method and apparatus for forming silicon-containing insulating film

Kazuhide Hasebe; Mitsuhiro Okada; Pao-Hwa Chou; Jun Ogawa; Chaeho Kim; Kohei Fukushima; Toshiki Takahashi; Jun Sato

Archive | 2009

Vertical plasma processing method for forming silicon containing film

Toshiki Takahashi; Kohei Fukushima; Koichi Orito; Jun Sato

Archive | 2002

Method and device for forming silicon nitride film, and method for preprocessing of cleaning thereof

Atsushi Endo; Kohei Fukushima; Hisashi Kato; Takeshi Kumagai; Tatsuo Nishida; 寿 加藤; 武 熊谷; 講平 福島; 辰夫 西田; 篤 遠藤

Archive | 2004

Silicon nitride film forming method, silicon nitride film forming system and silicon nitride film forming system precleaning method

Hitoshi Kato; Kohei Fukushima; Atsushi Endo; Tatsuo Nishita; Takeshi Kumagai

Archive | 2007

Vertical plasma processing apparatus and method for semiconductor process

Toshiki Takahashi; Kohei Fukushima; Koichi Orito; Jun Sato

Archive | 2002

Precleaning method of precleaning a silicon nitride film forming system

Hitoshi Kato; Kohei Fukushima; Atsushi Endo; Tatsuo Nishita; Takeshi Kumagai

Archive | 2005

Deposition method, deposition apparatus, and storage medium

Pao-Hwa Chou; Kohei Fukushima; Kazuhide Hasebe; Saiko Kin; Atsushi Ogawa; Mitsuhiro Okada; Jun Sato; Toshiki Takahashi; 潤 佐藤; 保華 周; 淳 小川; 充弘 岡田; 講平 福島; 採虎 金; 一秀 長谷部; 俊樹 高橋

Archive | 2015

VERTICAL HEAT TREATMENT APPARATUS AND METHOD OF OPERATING VERTICAL HEAT TREATMENT APPARATUS

Yutaka Motoyama; Kohei Fukushima; Masanobu Matsunaga; Keiji Tabuki; Yamato Tonegawa

Archive | 2017

Vertical type heat treatment device and running method of vertical type heat treatment device

Yamato Tonegawa; Kohei Fukushima; Masanobu Matsunaga; Keiji Tabuki; Yutaka Motoyama

Archive | 2015

Operating method of vertical heat treatment apparatus, and vertical heat treatment apparatus

Yutaka Motoyama; Keisuke Suzuki; Hiromi Takahashi; Kohei Fukushima

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Collaboration

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Yutaka Motoyama

Tokyo Electron

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Jun Sato

Tokyo Electron

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Keisuke Suzuki

Daiichi Sankyo

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Toshiki Takahashi

Tokyo Electron

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Atsushi Endo

Tokyo Electron

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Masanobu Matsunaga

Tokyo Electron

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Takeshi Kumagai

Tokyo Electron

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Yamato Tonegawa

Tokyo Electron

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Hitoshi Kato

Tokyo Electron

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Kazuhide Hasebe

Tokyo Electron

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