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Yamato Tonegawa

Tokyo Electron

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Publication

Featured researches published by Yamato Tonegawa.

Archive | 2009

Film formation method and apparatus for forming silicon-containing insulating film doped with metal

Kentaro Kadonaga; Yamato Tonegawa; Pao-Hwa Chou; Kazuhide Hasebe; Tetsuya Shibata

Archive | 2007

Cleaning method for thin film forming apparatus, thin film forming method, and thin film forming apparatus

Toshiharu Nishimura; Mitsuhiro Okada; Satoshi Takagi; Masahiko Tomita; Yamato Tonegawa; 正彦 冨田; 充弘 岡田; 大和 戸根川; 俊治 西村; 聡史 高木

Archive | 2002

System and method for performing semiconductor processing on substrate being processed

Koichi Sakamoto; Yamato Tonegawa; Takehiko Fujita

Archive | 2009

FILM FORMATION APPARATUS FOR SEMICONDUCTOR PROCESS AND METHOD FOR USING SAME

Mitsuhiro Okada; Yamato Tonegawa

Archive | 2008

Film formation apparatus and method for using the same

Mitsuhiro Okada; Satoshi Mizunaga; Yamato Tonegawa; Toshiharu Nishimura

Archive | 2006

Method for using film formation apparatus

Naotaka Noro; Yamato Tonegawa; Takehiko Fujita; Norifumi Kimura

Archive | 2009

Metal smearing reduction method of deposition device, method of manufacturing semiconductor device, storage medium, and deposition device

Mitsuhiro Okada; Yamato Tonegawa; 充弘 岡田; 大和 戸根川

Archive | 2015

VERTICAL HEAT TREATMENT APPARATUS AND METHOD OF OPERATING VERTICAL HEAT TREATMENT APPARATUS

Yutaka Motoyama; Kohei Fukushima; Masanobu Matsunaga; Keiji Tabuki; Yamato Tonegawa

Archive | 2014

FILM FORMING APPARATUS, FILM FORMING METHOD AND NON-TRANSITORY STORAGE MEDIUM

Yamato Tonegawa; Katsutoshi Ishii

Archive | 2014

Method and apparatus of forming silicon nitride film

Yamato Tonegawa; Keiji Tabuki

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Collaboration

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Mitsuhiro Okada

Tokyo Electron

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Takehiko Fujita

Tokyo Electron

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Keiji Tabuki

Tokyo Electron

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Kohei Fukushima

Tokyo Electron

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Koichi Sakamoto

Tokyo Electron

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Masanobu Matsunaga

Tokyo Electron

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Toshiharu Nishimura

Tokyo Electron

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Yutaka Motoyama

Tokyo Electron

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Kazuhide Hasebe

Tokyo Electron

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Keisuke Suzuki

Tokyo Electron

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