Koji Kawada
Tohoku University
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Publication
Featured researches published by Koji Kawada.
Journal of The Electrochemical Society | 1993
Tadahiro Ohmi; Atsushi Ohki; Masakazu Nakamura; Koji Kawada; Tsuyoshi Watanabe; Yoshinori Nakagawa; Shinji Miyoshi; Shinji Takahashi; Michael S. K. Chen
A complete chromium oxide (Cr[sub 2]O[sub 3]) passivation technology has been developed for stainless steel surfaces for use in high purity gas-delivery systems and process chambers. Starting with an electrochemical buffing (ECB) to add to electro-polished (EP) SUS316L stainless steel material, an optimal thermal treatment was found by using a gas mixture of 10% hydrogen, 1--10 ppm oxygen and argon balance gas at 500C for 1 h. Five-day corrosion tests with HCl gas (containing 1.4 ppm moisture) at 5 kg/cm[sup 2] and 100C showed no sign of corrosion on the chromium oxide passivated surface. Chemical stability tests on this surface with silane specialty gas thermal decomposition also showed a remarkable noncatalytic activity compared with conventional surfaces.
Archive | 1997
Koji Nishino; Nobukazu Ikeda; Akihiro Morimoto; Yukio Minami; Koji Kawada; Ryosuke Dohi; Hiroyuki Fukuda
Archive | 1997
Tadahiro Ohmi; Koji Kawada; Toshikazu Tanabe; Takahisa Nitta; Nobukazu Ikeda; Akihiro Morimoto; Keiji Hirao; Hiroshi Morokoshi; Yukio Minami
Archive | 1996
Ryosuke Doi; Hiroyuki Fukuda; Shinichi Ikeda; Koji Kawada; Yukio Minami; Akihiro Morimoto; Koji Nishino; Tadahiro Omi; 亮介 土肥; 忠弘 大見; 幸司 川田; 明弘 森本; 信一 池田; 幸男 皆見; 浩幸 福田; 功二 西野
Archive | 1998
Tadahiro Ohmi; Yukio Minami; Koji Kawada; Yoshikazu Tanabe; Nobukazu Ikeda; Akihiro Morimoto
Archive | 2003
Tadahiro Ohmi; Yasuyuki Shirai; Takumi Fujita; Yukio Minami; Nobukazu Ikeda; Akihiro Morimoto; Koji Kawada
Archive | 1998
Tadahiro Ohmi; Koji Kawada; Yoshikazu Tanabe; Nobukazu Ikeda; Akihiro Morimoto; Yukio Minami
Archive | 2009
Gisuke Kohno; Teruo Honiden; Akihiro Morimoto; Naofumi Yasumoto; Koji Kawada; Yutaka Ueji; Nobukazu Ikeda; Masayuki Hatano; Michio Kuramochi; Yoshiyuki Kindai; Kazuhiro Nagano; Toshiaki Wada
Archive | 2005
Tadahiro Ohmi; Yukio Minami; Kenji Tubota; Tsutomu Shinohara; Michio Yamaji; Nobukazu Ikeda; Akihiro Morimoto; Koji Kawada; Toshiro Nariai
Archive | 2000
Tadahiro Ohmi; Koji Kawada; Nobukazu Ikeda; Akihiro Morimoto; Yukio Minami; Keiji Hirao; Shinji Sakamoto; Masafumi Kitano
