Konstantine Kaznatcheev

Non-null full field X-ray mirror metrology using SCOTS: a reflection deflectometry approach

In a previous paper, the University of Arizona (UA) has developed a measurement technique called: Software Configurable Optical Test System (SCOTS) based on the principle of reflection deflectometry. In this paper, we present results of this very efficient optical metrology method applied to the metrology of X-ray mirrors. We used this technique to measure surface slope errors with precision and accuracy better than 100 nrad (rms) and ~200 nrad (rms), respectively, with a lateral resolution of few mm or less. We present results of the calibration of the metrology systems, discuss their accuracy and address the precision in measuring a spherical mirror.

Self-assembly, condensation, and order in aqueous lyotropic chromonic liquid crystals crowded with additives†

Dense multicomponent systems with macromolecules and small solutes attract a broad research interest as they mimic the molecularly crowded cellular interiors. The additives can condense and align the macromolecules, but they do not change the degree of covalent polymerization. We chose a lyotropic chromonic liquid crystal with reversibly and non-covalently assembled aggregates as a much softer system, reminiscent of “living polymers”, to demonstrate that small neutral and charged additives cause condensation of aggregates with ensuing orientational and positional ordering and nontrivial morphologies of phase separation, such as tactoids and toroids of the nematic and hexagonal columnar phase coexisting with the isotropic melt. Scanning transmission X-ray microscopy (STXM) with near edge X-ray absorption fine structure (NEXAFS) analysis as well as fluorescent microscopy demonstrates segregation of the components. The observations suggest that self-assembly of chromonic aggregates in the presence of additives is controlled by both entropy effects and by specific molecular interactions and provide a new route to the regulated reversible assembly of soft materials formed by low-molecular weight components.

A 2 D high accuracy slope measuring system based on a Stitching Shack Hartmann Optical Head

We present a 2D Slope measuring System based on a Stitching Shack Hartmann Optical Head (SSH-OH) aiming to perform high accuracy optical metrology for X-ray mirrors. This system was developed to perform high-accuracy automated metrology for extremely high quality optical components needed for synchrotrons or Free Electrons Lasers (FEL), EUV lithography and x-ray astronomy with slope error accuracy better than 50 nrad rms.

Synchrotron X-ray tests of an L-shaped laterally graded multilayer mirror for the analyzer system of the ultra-high-resolution IXS spectrometer at NSLS-II

Characterization and testing of an L-shaped laterally graded multilayer mirror are presented. This mirror is designed as a two-dimensional collimating optics for the analyzer system of the ultra-high-resolution inelastic X-ray scattering (IXS) spectrometer at National Synchrotron Light Source II (NSLS-II). The characterization includes point-to-point reflectivity measurements, lattice parameter determination and mirror metrology (figure, slope error and roughness). The synchrotron X-ray test of the mirror was carried out reversely as a focusing device. The results show that the L-shaped laterally graded multilayer mirror is suitable to be used, with high efficiency, for the analyzer system of the IXS spectrometer at NSLS-II.

Surface curvatures and diffraction profiles of sagittally bent Laue crystals

The performance of a bent Laue crystal monochromator crucially depends on the sagittal and meridional bending curvatures of the crystal. To optimize the design of monochromator crystals, the surface curvatures and diffraction profiles of a set of sagittally bent Laue crystals with different aspect ratios have been studied experimentally by optical metrology and X-ray measurements. The results were confirmed with finite-element analysis using large-deformation theory. The nonlinear relationship between the curvatures necessitates an experimentally determined parameter in the theoretical modeling of the diffraction profiles. By taking into account the local stress and the aspect ratio of the sagittally bent Laue crystal, the modified analytical approach successfully predicts the rocking-curve width and the integrated reflecting power. The effect of extreme sagittal bending on the rocking curve is also discussed. To retain high reflectivity, the bending curvature should not exceed its critical value for the specified crystal geometry. Furthermore, the uniformity of the bending curvatures across the crystal surface has been examined, which suggests that the minimum crystal dimension should be approximately twice the size of the beam footprint.

One-dimensional ion-beam figuring for grazing-incidence reflective optics

One-dimensional ion-beam figuring (1D-IBF) can improve grazing-incidence reflective optics, such as Kirkpatrick-Baez mirrors. 1D-IBF requires only one motion degree of freedom, which reduces equipment complexity, resulting in compact and low-cost IBF instrumentation. Furthermore, 1D-IBF is easy to integrate into a single vacuum system with other fabrication processes, such as a thin-film deposition. The NSLS-II Optical Metrology and Fabrication Group has recently integrated the 1D-IBF function into an existing thin-film deposition system by adding an RF ion source to the system. Using a rectangular grid, a 1D removal function needed to perform 1D-IBF has been produced. In this paper, demonstration experiments of the 1D-IBF process are presented on one spherical and two plane samples. The final residual errors on both plane samples are less than 1 nm r.m.s. The surface error on the spherical sample has been successfully reduced by a factor of 12. The results show that the 1D-IBF method is an effective method to process high-precision 1D synchrotron optics.

A one-dimensional ion beam figuring system for x-ray mirror fabrication.

We report on the development of a one-dimensional Ion Beam Figuring (IBF) system for x-ray mirror polishing. Ion beam figuring provides a highly deterministic method for the final precision figuring of optical components with advantages over conventional methods. The system is based on a state of the art sputtering deposition system outfitted with a gridded radio frequency inductive coupled plasma ion beam source equipped with ion optics and dedicated slit developed specifically for this application. The production of an IBF system able to produce an elongated removal function rather than circular is presented in this paper, where we describe in detail the technical aspect and present the first obtained results.

One-dimensional stitching interferometry assisted by a triple-beam interferometer

In this work, we proposed for stitching interferometry to use a triple-beam interferometer to measure both the distance and the tilt for all sub-apertures before the stitching process. The relative piston between two neighboring sub-apertures is then calculated by using the data in the overlapping area. Comparisons are made between our method, and the classical least-squares principle stitching method. Our method can improve the accuracy and repeatability of the classical stitching method when a large number of sub-aperture topographies are taken into account. Our simulations and experiments on flat and spherical mirrors indicate that our proposed method can decrease the influence of the interferometer error from the stitched result. The comparison of stitching system with Fizeau interferometry data is about 2 nm root mean squares and the repeatability is within ± 2.5 nm peak to valley.

New figuring model based on surface slope profile for grazing-incidence reflective optics.

Surface slope profile is widely used in the metrology of grazing-incidence reflective optics instead of surface height profile. Nevertheless, the theoretical and experimental model currently used in deterministic optical figuring processes is based on surface height, not on surface slope. This means that the raw slope profile data from metrology need to be converted to height profile to perform the current height-based figuring processes. The inevitable measurement noise in the raw slope data will introduce significant cumulative error in the resultant height profiles. As a consequence, this conversion will degrade the determinism of the figuring processes, and will have an impact on the ultimate surface figuring results. To overcome this problem, an innovative figuring model is proposed, which directly uses the raw slope profile data instead of the usual height data as input for the deterministic process. In this paper, first the influence of the measurement noise on the resultant height profile is analyzed, and then a new model is presented; finally a demonstration experiment is carried out using a one-dimensional ion beam figuring process to demonstrate the validity of our approach.

Performance Optimization for Hard X-ray Microscopy Beamlines Guided by Partially-Coherent Wavefront Propagation Calculations

Hard x‐ray range synchrotron radiation still remains only partially coherent even for ultra‐low emittance third‐generation sources, such as NSLS‐II. On the other hand, many of the scientific goals targeted by new advanced hard x‐ray microscopy beamlines—e.g. development of scanning microscopy with nanometer‐scale spatial resolution or coherent diffraction imaging microscopy—require high degree of transverse coherence and high radiation flux at a sample. Detailed quantitative prediction of partially‐coherent x‐ray beam properties at propagation from an undulator, along a beamline with a number of optical elements, can only be obtained from accurate physical‐optics based numerical simulations. We present an example of such simulations performed for the NSLS‐II Hard x‐ray Nanoprobe beamline using “Synchrotron Radiation Workshop” (SRW) computer code. In addition to tracking of intensity distributions at different locations of the beamline, we include numerical experiments with a two‐slit interference scheme i...