Network


Latest external collaboration on country level. Dive into details by clicking on the dots.

Hotspot


Dive into the research topics where Kristina Vogt is active.

Publication


Featured researches published by Kristina Vogt.


Archive | 2001

Polishing agent and method for producing planar layers

Kristina Vogt; Dietrich Pantke; Lothar Puppe; Stephan Kirchmeyer


Archive | 2003

Acidic polishing slurry for the chemical-mechanical polishing of SiO2 isolation layers

Kristina Vogt; Lothar Puppe; Chun-Kuo Min; Li-Mei Chen


Archive | 2002

Composition for the chemical mechanical polishing of metal- and metal-dielectric structures with a high selectivity

Gerd Passing; Lothar Puppe; Valentina Dr. Terzieva; Kristina Vogt


Archive | 2001

Polishing slurry for the chemical mechanical polishing of metal and dielectric structures

Kristina Vogt; Gerd Passing; Ming-Shih Tsai


Archive | 2001

Polishing slurry for the chemical-mechanical polishing of silica films

Kristina Vogt; Lothar Puppe; Chun-Kuo Min; Li-Mei Chen; Hsin-Hsen Lu


Archive | 2002

Process for the chemical-mechanical polishing of isolation layers produced using the STI technology, at elevated temperatures

Kristina Vogt; Lothar Puppe; Chun-Kuo Min; Li-Mei Chen


Archive | 2001

ACID GRINDING SLURRY FOR CHEMICAL MECHANICAL POLISHING OF SiO2 SEPARATION LAYER

Li-Mei Chen; Chun-Kuo Min; Lothar Puppe; Kristina Vogt; クリスチーナ・フオクト; チユン−クオ・ミン; リ−メイ・チエン; ロター・プツペ


Archive | 2004

Method of polishing metal and metal/dielectric structures

Lothar Puppe; Gerd Passing; Kristina Vogt; Valentina Terzieva


Archive | 2001

Polishing slurry for the chemical mechanical polishing of silicon dioxide films

Li-Mei Dr. Chen; Hsin-Hsen Lu; Chun-Kuo Min; Lothar Puppe; Kristina Vogt


Archive | 2001

Zusammensetzung für das chemisch-mechanische Polieren von Metall- und Metall/Dielektrikastrukturen mit hoher Selektivität A composition for the chemical mechanical polishing of metal and metal / dielectric structures with a high selectivity

Lothar Puppe; Gerd Passing; Kristina Vogt; Valentina Terzieva

Collaboration


Dive into the Kristina Vogt's collaboration.

Researchain Logo
Decentralizing Knowledge