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Kuibira Akira

Sumitomo Electric Industries

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Publication

Featured researches published by Kuibira Akira.

Archive | 2003

Heater module for semiconductor manufacturing device

Kuibira Akira; Nakata Hirohiko

Archive | 2006

Aluminium nitride sintered body and manufacturing method thereof

Kuibira Akira; Higaki Kenjiro; Nakata Hirohiko; Sasaki Kazutaka; Ishii Takashi

Archive | 2004

Wafer holding body and semiconductor manufacturing device

Natsuhara Masuhiro; Nakata Hirohiko; Kuibira Akira; Hashikura Manabu

Archive | 2004

Ceramic heater for semiconductor manufacturing tool

Kachi Yoshifumi; Kuibira Akira; Nakata Hirohiko

Archive | 2004

Holding body for semiconductor manufacturing apparatus

Kuibira Akira; Natsuhara Masuhiro; Nakata Hirohiko

Archive | 2003

Semiconductor manufacturing apparatus having wafer holder for semiconductor manufacturing apparatus

Ishii Takashi; Kuibira Akira; Higaki Kenjiro; Nakata Hirohiko; Natsuhara Masuhiro

Archive | 2003

SEMICONDUCTOR OR LIQUID CRYSTAL MANUFACTURING APPARATUS

Kuibira Akira; Natsuhara Masuhiro; Nakata Hirohiko

Archive | 2003

Wafer holder for semiconductor manufacturing apparatus and method of manufacturing wafer holder

Ishii Takashi; Kuibira Akira; Higaki Kenjiro; Nakata Hirohiko; Natsuhara Masuhiro

Archive | 2012

Holder for use in semiconductor or liquid-crystal

Hashikura Manabu; Nakata Hirohiko; Kuibira Akira; Natsuhara Masuhiro

Archive | 2008

Leitungsmuster von elekrischen Heizelementen und Muster enthaltende Substratbehandlungsvorrichtung

Natsuhara Masuhiro; Nakata Hirohiko; Kuibira Akira; Narita Masashi

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Collaboration

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Nakata Hirohiko

Sumitomo Electric Industries

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Natsuhara Masuhiro

Sumitomo Electric Industries

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Higaki Kenjiro

Sumitomo Electric Industries

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Ishii Takashi

Sumitomo Electric Industries

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Sasaki Kazutaka

Sumitomo Electric Industries

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