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Nakata Hirohiko

Sumitomo Electric Industries

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Publication

Featured researches published by Nakata Hirohiko.

Archive | 2003

Heater module for semiconductor manufacturing device

Kuibira Akira; Nakata Hirohiko

Archive | 2007

Wafer holder, method for producing the same and semiconductor production apparatus

Natsuhara Masuhiro; Awazu Tomoyuki; Shinma Kenji; Nakata Hirohiko

Archive | 2006

Aluminium nitride sintered body and manufacturing method thereof

Kuibira Akira; Higaki Kenjiro; Nakata Hirohiko; Sasaki Kazutaka; Ishii Takashi

Archive | 2007

Semiconductor heating heater holder and semiconductor manufacturing apparatus

Natsuhara Masuhiro; Mikumo Akira; Awazu Tomoyuki; Nakata Hirohiko

Archive | 2005

Susceptor for Semiconductor Manufacturing Equipment, and Semiconductor Manufacturing Equipment in Which the Susceptor Is Installed

Natsuhara Masuhiro; Nakata Hirohiko

Archive | 2004

Wafer holding body and semiconductor manufacturing device

Natsuhara Masuhiro; Nakata Hirohiko; Kuibira Akira; Hashikura Manabu

Archive | 2004

Ceramic heater for semiconductor manufacturing tool

Kachi Yoshifumi; Kuibira Akira; Nakata Hirohiko

Archive | 2004

Holding body for semiconductor manufacturing apparatus

Kuibira Akira; Natsuhara Masuhiro; Nakata Hirohiko

Archive | 2003

Semiconductor manufacturing apparatus having wafer holder for semiconductor manufacturing apparatus

Ishii Takashi; Kuibira Akira; Higaki Kenjiro; Nakata Hirohiko; Natsuhara Masuhiro

Archive | 2003

SEMICONDUCTOR OR LIQUID CRYSTAL MANUFACTURING APPARATUS

Kuibira Akira; Natsuhara Masuhiro; Nakata Hirohiko

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Collaboration

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Natsuhara Masuhiro

Sumitomo Electric Industries

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Kuibira Akira

Sumitomo Electric Industries

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Sasaki Kazutaka

Sumitomo Electric Industries

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Higaki Kenjiro

Sumitomo Electric Industries

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Ishii Takashi

Sumitomo Electric Industries

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Kobayashi Mitsunori

Sumitomo Electric Industries

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Sasame Akira

Sumitomo Electric Industries

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