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Natsuhara Masuhiro

Sumitomo Electric Industries

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Publication

Featured researches published by Natsuhara Masuhiro.

Archive | 2005

HEATER UNIT AND APPARATUS CARRYING THE SAME

Niima Kenji; Nakada Hirohiko; Natsuhara Masuhiro

Archive | 2006

Holder for semiconductor manufacturing apparatus

Hiiragidaira Hiroshi; Natsuhara Masuhiro; Nakada Hirohiko

Archive | 2006

HEATING ELEMENT FOR SEMICONDUCTOR MANUFACTURING APPARATUS AND HEATING APPARATUS LOADING HEATING ELEMENT

Hiiragidaira Hiroshi; Mikumo Akira; Natsuhara Masuhiro; Nakada Hirohiko

Archive | 2002

SUSCEPTOR FOR SEMICONDUCTOR MANUFACTURING DEVICE AND SEMICONDUCTOR MANUFACTURING DEVICE USING THE SAME

Higaki Kenjiro; Nakada Hirohiko; Tomikawa Tadashi; Hiiragidaira Hiroshi; Natsuhara Masuhiro; Ishii Takashi; Matsui Yasuyuki

Archive | 2005

Substrate holding structure and substrate processing apparatus

Tanaka Kiyoshi; Saito Tetsuya; Natsuhara Masuhiro; Nakada Hirohiko

Archive | 2004

WAFER HOLDER AND APPARATUS FOR PRODUCING SEMICONDUCTOR

Natsuhara Masuhiro; Nakada Hirohiko; Hiiragidaira Hiroshi; Hashikura Manabu

Archive | 1999

ALUMINUM NITRIDE SINTERED BODY AND ITS METALLIZED SUBSTRATE

Yushio Yasuhisa; Nakada Hirohiko; Sasaki Kazutaka; Natsuhara Masuhiro; Tanaka Motoyuki

Archive | 2007

WAFER SUPPORT FOR WAFER PROBER, AND WAFER PROBER MOUNTED THEREWITH

Natsuhara Masuhiro; Itakura Katsuhiro; Nakada Hirohiko

Archive | 2007

WAFER HOLDER FOR WAFER PROBER AND WAFER PROBER THEREWITH

Natsuhara Masuhiro; Itakura Katsuhiro; Nakada Hirohiko

Archive | 2007

CONVEX STRUCTURAL MEMBER

Hiiragidaira Hiroshi; Natsuhara Masuhiro; Awazu Tomoyuki; Nakada Hirohiko

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Collaboration

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Nakata Hirohiko

Sumitomo Electric Industries

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Kuibira Akira

Sumitomo Electric Industries

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Sasaki Kazutaka

Sumitomo Electric Industries

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Ishii Takashi

Sumitomo Electric Industries

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Higaki Kenjiro

Sumitomo Electric Industries

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